FR2130955A6 - - Google Patents
Info
- Publication number
- FR2130955A6 FR2130955A6 FR7110838A FR7110838A FR2130955A6 FR 2130955 A6 FR2130955 A6 FR 2130955A6 FR 7110838 A FR7110838 A FR 7110838A FR 7110838 A FR7110838 A FR 7110838A FR 2130955 A6 FR2130955 A6 FR 2130955A6
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7110838A FR2130955A6 (enExample) | 1971-03-26 | 1971-03-26 | |
| CH1275771A CH537096A (fr) | 1971-03-26 | 1971-08-31 | Appareil de masquage optique d'une couche photosensible |
| BE772057A BE772057A (fr) | 1971-03-26 | 1971-09-01 | Appareil de masquage optique de couches |
| NL7112018A NL7112018A (enExample) | 1971-03-26 | 1971-09-01 | |
| DD15752971A DD94438A5 (enExample) | 1971-03-26 | 1971-09-03 | |
| IT5265471A IT939372B (it) | 1971-03-26 | 1971-09-03 | Apparecchio per il mascheramento ottico di strati fotosensibili |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7110838A FR2130955A6 (enExample) | 1971-03-26 | 1971-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2130955A6 true FR2130955A6 (enExample) | 1972-11-10 |
Family
ID=9074232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7110838A Expired FR2130955A6 (enExample) | 1971-03-26 | 1971-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2130955A6 (enExample) |
-
1971
- 1971-03-26 FR FR7110838A patent/FR2130955A6/fr not_active Expired