FR2128477A1 - - Google Patents

Info

Publication number
FR2128477A1
FR2128477A1 FR7207072A FR7207072A FR2128477A1 FR 2128477 A1 FR2128477 A1 FR 2128477A1 FR 7207072 A FR7207072 A FR 7207072A FR 7207072 A FR7207072 A FR 7207072A FR 2128477 A1 FR2128477 A1 FR 2128477A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7207072A
Other languages
French (fr)
Inventor
C Dobson
K Willmott
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB574571A external-priority patent/GB1391063A/en
Priority claimed from GB2778871A external-priority patent/GB1392292A/en
Application filed by Individual filed Critical Individual
Publication of FR2128477A1 publication Critical patent/FR2128477A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7207072A 1971-03-02 1972-03-01 Withdrawn FR2128477A1 (Direct)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB574571A GB1391063A (en) 1971-03-02 1971-03-02 Apparatus for vacuum deposition
GB2778871A GB1392292A (en) 1971-06-14 1971-06-14 Apparatus for vacuum deposition
GB2835771 1971-06-17

Publications (1)

Publication Number Publication Date
FR2128477A1 true FR2128477A1 (Direct) 1972-10-20

Family

ID=27254698

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7207072A Withdrawn FR2128477A1 (Direct) 1971-03-02 1972-03-01

Country Status (4)

Country Link
DE (1) DE2209857A1 (Direct)
FR (1) FR2128477A1 (Direct)
IT (1) IT952883B (Direct)
NL (1) NL7202729A (Direct)

Also Published As

Publication number Publication date
DE2209857A1 (de) 1972-09-14
NL7202729A (Direct) 1972-09-05
IT952883B (it) 1973-07-30

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Legal Events

Date Code Title Description
ST Notification of lapse