FR2118625A5 - - Google Patents

Info

Publication number
FR2118625A5
FR2118625A5 FR7144952A FR7144952A FR2118625A5 FR 2118625 A5 FR2118625 A5 FR 2118625A5 FR 7144952 A FR7144952 A FR 7144952A FR 7144952 A FR7144952 A FR 7144952A FR 2118625 A5 FR2118625 A5 FR 2118625A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7144952A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Application granted granted Critical
Publication of FR2118625A5 publication Critical patent/FR2118625A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
FR7144952A 1970-12-15 1971-12-14 Expired FR2118625A5 (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45111287A JPS509187B1 (en:Method) 1970-12-15 1970-12-15

Publications (1)

Publication Number Publication Date
FR2118625A5 true FR2118625A5 (en:Method) 1972-07-28

Family

ID=14557388

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7144952A Expired FR2118625A5 (en:Method) 1970-12-15 1971-12-14

Country Status (4)

Country Link
JP (1) JPS509187B1 (en:Method)
DE (1) DE2161746A1 (en:Method)
FR (1) FR2118625A5 (en:Method)
GB (1) GB1380074A (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115480353B (zh) * 2022-09-16 2025-06-03 业成光电（深圳）有限公司 光学对位方法及光学对位装置

Also Published As

Publication number Publication date
JPS509187B1 (en:Method) 1975-04-10
GB1380074A (en) 1975-01-08
DE2161746A1 (de) 1972-07-06

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Legal Events

Date Code Title Description
ST Notification of lapse