FR2113792A1 - - Google Patents

Info

Publication number
FR2113792A1
FR2113792A1 FR7041030A FR7041030A FR2113792A1 FR 2113792 A1 FR2113792 A1 FR 2113792A1 FR 7041030 A FR7041030 A FR 7041030A FR 7041030 A FR7041030 A FR 7041030A FR 2113792 A1 FR2113792 A1 FR 2113792A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7041030A
Other languages
French (fr)
Other versions
FR2113792B1 (OSRAM
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOROVIN IVAN
LUTCHENKOV ANATOLY
SHEKHODANOV MIKHAIL
SIYANOV SERGEI
Original Assignee
KOROVIN IVAN
LUTCHENKOV ANATOLY
SHEKHODANOV MIKHAIL
SIYANOV SERGEI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOROVIN IVAN, LUTCHENKOV ANATOLY, SHEKHODANOV MIKHAIL, SIYANOV SERGEI filed Critical KOROVIN IVAN
Priority to FR7041030A priority Critical patent/FR2113792B1/fr
Publication of FR2113792A1 publication Critical patent/FR2113792A1/fr
Application granted granted Critical
Publication of FR2113792B1 publication Critical patent/FR2113792B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • H10P72/57—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
FR7041030A 1970-11-16 1970-11-16 Expired FR2113792B1 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7041030A FR2113792B1 (OSRAM) 1970-11-16 1970-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7041030A FR2113792B1 (OSRAM) 1970-11-16 1970-11-16

Publications (2)

Publication Number Publication Date
FR2113792A1 true FR2113792A1 (OSRAM) 1972-06-30
FR2113792B1 FR2113792B1 (OSRAM) 1976-05-28

Family

ID=9064212

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7041030A Expired FR2113792B1 (OSRAM) 1970-11-16 1970-11-16

Country Status (1)

Country Link
FR (1) FR2113792B1 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2478937A1 (fr) * 1980-03-21 1981-09-25 Cit Alcatel Dispositif de mise en place de plaquettes portant des circuits electroniques sous un appareil de traitement ou de controle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2478937A1 (fr) * 1980-03-21 1981-09-25 Cit Alcatel Dispositif de mise en place de plaquettes portant des circuits electroniques sous un appareil de traitement ou de controle

Also Published As

Publication number Publication date
FR2113792B1 (OSRAM) 1976-05-28

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Legal Events

Date Code Title Description
ST Notification of lapse