FR2112733A5 - - Google Patents

Info

Publication number
FR2112733A5
FR2112733A5 FR7040047A FR7040047A FR2112733A5 FR 2112733 A5 FR2112733 A5 FR 2112733A5 FR 7040047 A FR7040047 A FR 7040047A FR 7040047 A FR7040047 A FR 7040047A FR 2112733 A5 FR2112733 A5 FR 2112733A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7040047A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR7040047A priority Critical patent/FR2112733A5/fr
Application granted granted Critical
Publication of FR2112733A5 publication Critical patent/FR2112733A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/3222—Antennas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
FR7040047A 1970-11-06 1970-11-06 Expired FR2112733A5 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7040047A FR2112733A5 (fr) 1970-11-06 1970-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7040047A FR2112733A5 (fr) 1970-11-06 1970-11-06

Publications (1)

Publication Number Publication Date
FR2112733A5 true FR2112733A5 (fr) 1972-06-23

Family

ID=9063887

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7040047A Expired FR2112733A5 (fr) 1970-11-06 1970-11-06

Country Status (1)

Country Link
FR (1) FR2112733A5 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0398832A1 (fr) * 1989-05-18 1990-11-22 Defitech S.A. Réacteur à plasma perfectionné muni de moyens de couplage d'ondes électromagnétiques

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0398832A1 (fr) * 1989-05-18 1990-11-22 Defitech S.A. Réacteur à plasma perfectionné muni de moyens de couplage d'ondes électromagnétiques
FR2647293A1 (fr) * 1989-05-18 1990-11-23 Defitech Sa Reacteur a plasma perfectionne muni de moyens de couplage d'ondes electromagnetiques

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Legal Events

Date Code Title Description
ST Notification of lapse