FR2111008A5 - - Google Patents
Info
- Publication number
- FR2111008A5 FR2111008A5 FR7135837A FR7135837A FR2111008A5 FR 2111008 A5 FR2111008 A5 FR 2111008A5 FR 7135837 A FR7135837 A FR 7135837A FR 7135837 A FR7135837 A FR 7135837A FR 2111008 A5 FR2111008 A5 FR 2111008A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
- G01N25/4806—Details not adapted to a particular type of sample
- G01N25/4813—Details not adapted to a particular type of sample concerning the measuring means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/102—Mask alignment
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Combustion & Propulsion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US7850570A | 1970-10-06 | 1970-10-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2111008A5 true FR2111008A5 (en) | 1972-06-02 |
Family
ID=22144444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7135837A Expired FR2111008A5 (en) | 1970-10-06 | 1971-10-05 |
Country Status (7)
Country | Link |
---|---|
US (1) | US3710101A (en) |
JP (1) | JPS5128467B1 (en) |
CA (1) | CA930078A (en) |
DE (1) | DE2149344A1 (en) |
FR (1) | FR2111008A5 (en) |
GB (1) | GB1361804A (en) |
IT (1) | IT938979B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2234659A1 (en) * | 1973-06-19 | 1975-01-17 | Westinghouse Electric Corp | |
FR2279146A1 (en) * | 1974-07-18 | 1976-02-13 | Westinghouse Electric Corp | METHOD AND APPARATUS FOR ALIGNING A BEAM OF ELECTRONS ON AN IRRADIER ELEMENT |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2146106B1 (en) * | 1971-07-16 | 1977-08-05 | Thomson Csf | |
US3879613A (en) * | 1971-12-13 | 1975-04-22 | Philips Corp | Methods of manufacturing semiconductor devices |
US3832560A (en) * | 1973-06-13 | 1974-08-27 | Westinghouse Electric Corp | Method and apparatus for electron beam alignment with a member by detecting cathodoluminescence from oxide layers |
US3895234A (en) * | 1973-06-15 | 1975-07-15 | Westinghouse Electric Corp | Method and apparatus for electron beam alignment with a member |
US3875414A (en) * | 1973-08-20 | 1975-04-01 | Secr Defence Brit | Methods suitable for use in or in connection with the production of microelectronic devices |
US3849659A (en) * | 1973-09-10 | 1974-11-19 | Westinghouse Electric Corp | Alignment of a patterned electron beam with a member by electron backscatter |
GB1520925A (en) * | 1975-10-06 | 1978-08-09 | Mullard Ltd | Semiconductor device manufacture |
US4039810A (en) * | 1976-06-30 | 1977-08-02 | International Business Machines Corporation | Electron projection microfabrication system |
GB1557064A (en) * | 1976-09-09 | 1979-12-05 | Mullard Ltd | Masks suitable for use in electron image projectors |
GB1578259A (en) * | 1977-05-11 | 1980-11-05 | Philips Electronic Associated | Methods of manufacturing solid-state devices apparatus for use therein and devices manufactured thereby |
GB1604004A (en) * | 1977-10-11 | 1981-12-02 | Fujitsu Ltd | Method and apparatus for processing semi-conductor wafers |
JPS5827663B2 (en) * | 1979-06-04 | 1983-06-10 | 富士通株式会社 | Manufacturing method of semiconductor device |
JPS57183034A (en) * | 1981-05-07 | 1982-11-11 | Toshiba Corp | Electron bean transfer device |
JPS6088536U (en) * | 1983-11-24 | 1985-06-18 | 住友電気工業株式会社 | compound semiconductor wafer |
JPS60201626A (en) * | 1984-03-27 | 1985-10-12 | Canon Inc | Alignment equipment |
DE3584141D1 (en) * | 1984-11-20 | 1991-10-24 | Fujitsu Ltd | METHOD FOR PROJECTING A PHOTOELECTRIC IMAGE. |
US4871919A (en) * | 1988-05-20 | 1989-10-03 | International Business Machines Corporation | Electron beam lithography alignment using electric field changes to achieve registration |
US6875624B2 (en) * | 2002-05-08 | 2005-04-05 | Taiwan Semiconductor Manufacturing Co. Ltd. | Combined E-beam and optical exposure semiconductor lithography |
US7414403B2 (en) * | 2003-07-31 | 2008-08-19 | Chiodo Chris D | Imaging machine / MRI positioning assembly for magnet coils and specimens at the sweet spot of an imaging field |
CN108615250B (en) * | 2018-05-31 | 2022-04-26 | 上海联影医疗科技股份有限公司 | Image reconstruction method, device, system and computer readable storage medium |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3236707A (en) * | 1963-05-24 | 1966-02-22 | Sperry Rand Corp | Electrical circuitry and method |
US3326176A (en) * | 1964-10-27 | 1967-06-20 | Nat Res Corp | Work-registration device including ionic beam probe |
US3551734A (en) * | 1968-12-18 | 1970-12-29 | Westinghouse Electric Corp | Multi-coil electron image control apparatus |
-
1970
- 1970-10-06 US US00078505A patent/US3710101A/en not_active Expired - Lifetime
-
1971
- 1971-08-27 CA CA121520A patent/CA930078A/en not_active Expired
- 1971-09-16 GB GB4330271A patent/GB1361804A/en not_active Expired
- 1971-10-02 DE DE19712149344 patent/DE2149344A1/en active Pending
- 1971-10-05 FR FR7135837A patent/FR2111008A5/fr not_active Expired
- 1971-10-06 IT IT29575/71A patent/IT938979B/en active
- 1971-10-06 JP JP46077948A patent/JPS5128467B1/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2234659A1 (en) * | 1973-06-19 | 1975-01-17 | Westinghouse Electric Corp | |
FR2279146A1 (en) * | 1974-07-18 | 1976-02-13 | Westinghouse Electric Corp | METHOD AND APPARATUS FOR ALIGNING A BEAM OF ELECTRONS ON AN IRRADIER ELEMENT |
Also Published As
Publication number | Publication date |
---|---|
DE2149344A1 (en) | 1972-04-13 |
GB1361804A (en) | 1974-07-30 |
US3710101A (en) | 1973-01-09 |
JPS5128467B1 (en) | 1976-08-19 |
IT938979B (en) | 1973-02-10 |
CA930078A (en) | 1973-07-10 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |