FR2106858A5 - - Google Patents

Info

Publication number
FR2106858A5
FR2106858A5 FR7034886A FR7034886A FR2106858A5 FR 2106858 A5 FR2106858 A5 FR 2106858A5 FR 7034886 A FR7034886 A FR 7034886A FR 7034886 A FR7034886 A FR 7034886A FR 2106858 A5 FR2106858 A5 FR 2106858A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7034886A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7034886A priority Critical patent/FR2106858A5/fr
Application granted granted Critical
Publication of FR2106858A5 publication Critical patent/FR2106858A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2204—Specimen supports therefor; Sample conveying means therefore

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
FR7034886A 1970-09-25 1970-09-25 Expired FR2106858A5 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7034886A FR2106858A5 (fr) 1970-09-25 1970-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7034886A FR2106858A5 (fr) 1970-09-25 1970-09-25

Publications (1)

Publication Number Publication Date
FR2106858A5 true FR2106858A5 (fr) 1972-05-05

Family

ID=9061896

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7034886A Expired FR2106858A5 (fr) 1970-09-25 1970-09-25

Country Status (1)

Country Link
FR (1) FR2106858A5 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2549452A1 (fr) * 1983-07-21 1985-01-25 Balzers Hochvakuum Sas a vide avec des porte-objets pour introduire des objets dans des enceintes a vide et les faire sortir de celles-ci
WO2009097888A1 (fr) * 2008-02-04 2009-08-13 Krones Ag Système de sas pour l'entrée et la sortie de récipients dans et hors d'une chambre de traitement sous vide

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2549452A1 (fr) * 1983-07-21 1985-01-25 Balzers Hochvakuum Sas a vide avec des porte-objets pour introduire des objets dans des enceintes a vide et les faire sortir de celles-ci
WO2009097888A1 (fr) * 2008-02-04 2009-08-13 Krones Ag Système de sas pour l'entrée et la sortie de récipients dans et hors d'une chambre de traitement sous vide
US8602708B2 (en) 2008-02-04 2013-12-10 Krones Ag Lock device for adding and removing containers to and from a vacuum treatment chamber

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Legal Events

Date Code Title Description
ST Notification of lapse