FR2105305A5 - - Google Patents

Info

Publication number
FR2105305A5
FR2105305A5 FR7029257A FR7029257A FR2105305A5 FR 2105305 A5 FR2105305 A5 FR 2105305A5 FR 7029257 A FR7029257 A FR 7029257A FR 7029257 A FR7029257 A FR 7029257A FR 2105305 A5 FR2105305 A5 FR 2105305A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7029257A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7029257A priority Critical patent/FR2105305A5/fr
Priority to NL7110830A priority patent/NL7110830A/xx
Priority to DE19712139534 priority patent/DE2139534A1/de
Application granted granted Critical
Publication of FR2105305A5 publication Critical patent/FR2105305A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7029257A 1970-08-07 1970-08-07 Expired FR2105305A5 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR7029257A FR2105305A5 (ja) 1970-08-07 1970-08-07
NL7110830A NL7110830A (ja) 1970-08-07 1971-08-05
DE19712139534 DE2139534A1 (de) 1970-08-07 1971-08-06 Ionenimplantationsvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7029257A FR2105305A5 (ja) 1970-08-07 1970-08-07

Publications (1)

Publication Number Publication Date
FR2105305A5 true FR2105305A5 (ja) 1972-04-28

Family

ID=9059980

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7029257A Expired FR2105305A5 (ja) 1970-08-07 1970-08-07

Country Status (3)

Country Link
DE (1) DE2139534A1 (ja)
FR (1) FR2105305A5 (ja)
NL (1) NL7110830A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4587432A (en) * 1984-08-03 1986-05-06 Applied Materials, Inc. Apparatus for ion implantation

Also Published As

Publication number Publication date
DE2139534A1 (de) 1972-02-10
NL7110830A (ja) 1972-02-09

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Legal Events

Date Code Title Description
ST Notification of lapse