FR2105085B1 - - Google Patents

Info

Publication number
FR2105085B1
FR2105085B1 FR7034485A FR7034485A FR2105085B1 FR 2105085 B1 FR2105085 B1 FR 2105085B1 FR 7034485 A FR7034485 A FR 7034485A FR 7034485 A FR7034485 A FR 7034485A FR 2105085 B1 FR2105085 B1 FR 2105085B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7034485A
Other languages
French (fr)
Other versions
FR2105085A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments France SAS
Original Assignee
Texas Instruments France SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments France SAS filed Critical Texas Instruments France SAS
Priority to FR7034485A priority Critical patent/FR2105085A1/fr
Priority to DE19712147569 priority patent/DE2147569A1/de
Priority to GB4443571A priority patent/GB1374112A/en
Publication of FR2105085A1 publication Critical patent/FR2105085A1/fr
Application granted granted Critical
Publication of FR2105085B1 publication Critical patent/FR2105085B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/762Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
FR7034485A 1970-09-23 1970-09-23 Insulated gate field effect transistor - using silicon nitride mask for selective oxidation Granted FR2105085A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR7034485A FR2105085A1 (en) 1970-09-23 1970-09-23 Insulated gate field effect transistor - using silicon nitride mask for selective oxidation
DE19712147569 DE2147569A1 (de) 1970-09-23 1971-09-23 Verfahren zur Herstellung eines Feldeffekttransistors mit isolierter Steuerelektrode und nach diesem Verfahren erhaltener Feldeffekttransistor
GB4443571A GB1374112A (en) 1970-09-23 1971-09-23 Method of fabrication of an insulated gate field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7034485A FR2105085A1 (en) 1970-09-23 1970-09-23 Insulated gate field effect transistor - using silicon nitride mask for selective oxidation

Publications (2)

Publication Number Publication Date
FR2105085A1 FR2105085A1 (en) 1972-04-28
FR2105085B1 true FR2105085B1 (ja) 1976-07-23

Family

ID=9061746

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7034485A Granted FR2105085A1 (en) 1970-09-23 1970-09-23 Insulated gate field effect transistor - using silicon nitride mask for selective oxidation

Country Status (1)

Country Link
FR (1) FR2105085A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112103267A (zh) * 2020-10-26 2020-12-18 北京燕东微电子科技有限公司 一种半导体器件及其制造方法

Also Published As

Publication number Publication date
FR2105085A1 (en) 1972-04-28

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Legal Events

Date Code Title Description
ST Notification of lapse