Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe dOptique Precision Electronique et Mecanique SOPELEM SA
Original Assignee
Societe dOptique Precision Electronique et Mecanique SOPELEM SA
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Filing date
Publication date
Application filed by Societe dOptique Precision Electronique et Mecanique SOPELEM SAfiledCriticalSociete dOptique Precision Electronique et Mecanique SOPELEM SA
Priority to FR7029296ApriorityCriticalpatent/FR2102553A5/fr
Application grantedgrantedCritical
Publication of FR2102553A5publicationCriticalpatent/FR2102553A5/fr
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support