FR2096876B1 - - Google Patents
Info
- Publication number
- FR2096876B1 FR2096876B1 FR7025558A FR7025558A FR2096876B1 FR 2096876 B1 FR2096876 B1 FR 2096876B1 FR 7025558 A FR7025558 A FR 7025558A FR 7025558 A FR7025558 A FR 7025558A FR 2096876 B1 FR2096876 B1 FR 2096876B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/2633—Bombardment with radiation with high-energy radiation for etching, e.g. sputteretching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Ceramic Engineering (AREA)
- Bipolar Transistors (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7025558A FR2096876B1 (de) | 1970-07-09 | 1970-07-09 | |
GB3200071A GB1359707A (en) | 1970-07-09 | 1971-07-07 | Transistor for operation at very high frequencies and a method for the manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7025558A FR2096876B1 (de) | 1970-07-09 | 1970-07-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2096876A1 FR2096876A1 (de) | 1972-03-03 |
FR2096876B1 true FR2096876B1 (de) | 1973-08-10 |
Family
ID=9058531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7025558A Expired FR2096876B1 (de) | 1970-07-09 | 1970-07-09 |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR2096876B1 (de) |
GB (1) | GB1359707A (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2027986B (en) * | 1978-07-31 | 1983-01-19 | Philips Electronic Associated | Infra-red detectors |
DE2855864A1 (de) * | 1978-12-22 | 1980-07-10 | Ibm Deutschland | Ionenquelle, insbesondere fuer ionenimplantationsanlagen |
US4259145A (en) * | 1979-06-29 | 1981-03-31 | International Business Machines Corporation | Ion source for reactive ion etching |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1228754A (de) * | 1967-05-26 | 1971-04-21 |
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1970
- 1970-07-09 FR FR7025558A patent/FR2096876B1/fr not_active Expired
-
1971
- 1971-07-07 GB GB3200071A patent/GB1359707A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2096876A1 (de) | 1972-03-03 |
GB1359707A (en) | 1974-07-10 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |