FR2094473A5 - - Google Patents
Info
- Publication number
- FR2094473A5 FR2094473A5 FR7023085A FR7023085A FR2094473A5 FR 2094473 A5 FR2094473 A5 FR 2094473A5 FR 7023085 A FR7023085 A FR 7023085A FR 7023085 A FR7023085 A FR 7023085A FR 2094473 A5 FR2094473 A5 FR 2094473A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7023085A FR2094473A5 (enExample) | 1970-06-23 | 1970-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7023085A FR2094473A5 (enExample) | 1970-06-23 | 1970-06-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2094473A5 true FR2094473A5 (enExample) | 1972-02-04 |
Family
ID=9057618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7023085A Expired FR2094473A5 (enExample) | 1970-06-23 | 1970-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2094473A5 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2435081A1 (fr) * | 1978-08-30 | 1980-03-28 | Dainippon Screen Mfg | Procede et appareil pour positionner un objet, tel qu'une pellicule photographique, a l'aide de moyens opto-electroniques |
-
1970
- 1970-06-23 FR FR7023085A patent/FR2094473A5/fr not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2435081A1 (fr) * | 1978-08-30 | 1980-03-28 | Dainippon Screen Mfg | Procede et appareil pour positionner un objet, tel qu'une pellicule photographique, a l'aide de moyens opto-electroniques |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |