FR2091825A5 - - Google Patents
Info
- Publication number
- FR2091825A5 FR2091825A5 FR7118298A FR7118298A FR2091825A5 FR 2091825 A5 FR2091825 A5 FR 2091825A5 FR 7118298 A FR7118298 A FR 7118298A FR 7118298 A FR7118298 A FR 7118298A FR 2091825 A5 FR2091825 A5 FR 2091825A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US3894070A | 1970-05-20 | 1970-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2091825A5 true FR2091825A5 (cg-RX-API-DMAC10.html) | 1972-01-14 |
Family
ID=21902782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7118298A Expired FR2091825A5 (cg-RX-API-DMAC10.html) | 1970-05-20 | 1971-05-19 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3641812A (cg-RX-API-DMAC10.html) |
| JP (1) | JPS5232236B1 (cg-RX-API-DMAC10.html) |
| DE (1) | DE2123690B2 (cg-RX-API-DMAC10.html) |
| FR (1) | FR2091825A5 (cg-RX-API-DMAC10.html) |
| GB (1) | GB1296641A (cg-RX-API-DMAC10.html) |
| SE (1) | SE380623B (cg-RX-API-DMAC10.html) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2146339B2 (de) * | 1971-09-16 | 1975-04-03 | Industrie-Automation Gmbh & Co, 6900 Heidelberg | Elektromechanischer Kraft- oder Druckmeßwandler |
| US3780588A (en) * | 1972-03-31 | 1973-12-25 | Honeywell Inc | Differential pressure responsive apparatus |
| US3930412A (en) * | 1975-01-03 | 1976-01-06 | Kulite Semiconductor Products, Inc. | Electrically scanned pressure transducer configurations |
| US4050313A (en) * | 1975-06-04 | 1977-09-27 | Hitachi, Ltd. | Semiconductor pressure transducer |
| DE2828605C3 (de) * | 1977-06-29 | 1982-01-14 | Tokyo Shibaura Denki K.K., Kawasaki, Kanagawa | Halbleitervorrichtung |
| JPS54113379A (en) * | 1978-02-23 | 1979-09-04 | Nec Corp | Pressure gauge |
| US4205556A (en) * | 1979-02-12 | 1980-06-03 | Rockwell International Corporation | Circuitry for strain sensitive apparatus |
| US4321832A (en) * | 1980-03-07 | 1982-03-30 | Rockwell International Corporation | High accuracy measuring apparatus |
| DE3532333A1 (de) * | 1985-09-11 | 1987-03-19 | Degussa | Elektrischer fuehler fuer druck- und kraftmessungen |
| US4896098A (en) * | 1987-01-08 | 1990-01-23 | Massachusetts Institute Of Technology | Turbulent shear force microsensor |
| DE3702412A1 (de) * | 1987-01-28 | 1988-08-18 | Philips Patentverwaltung | Druckaufnehmer mit einem siliziumkoerper |
| WO1988008522A1 (fr) * | 1987-04-24 | 1988-11-03 | Kabushiki Kaisha Nexy Kenkyusho | Detecteur de forces, d'acceleration et de magnetisme, utilisant des resistances |
| JP3009239B2 (ja) * | 1991-04-02 | 2000-02-14 | 本田技研工業株式会社 | 半導体センサ |
| US5397911A (en) * | 1991-04-02 | 1995-03-14 | Honda Giken Kogyo Kabushiki Kaisha | Semiconductor sensor with plural gate electrodes |
| JP3131642B2 (ja) * | 1994-09-14 | 2001-02-05 | 日本電子工業株式会社 | 応力複合化センサ及びこれを用いた構造体の応力測定装置 |
| KR102544041B1 (ko) * | 2015-03-31 | 2023-06-15 | 가부시키가이샤 네지로 | 통전로 부부재 및 통전로의 패터닝 방법, 부재 변화 계측 방법 |
| DE102018125079B4 (de) * | 2018-10-10 | 2023-12-28 | Schaeffler Technologies AG & Co. KG | Spannungswellengetriebe und Übertragungselement hierfür sowie Roboterarm und Verfahren zum Messen eines Drehmomentes |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3123788A (en) * | 1964-03-03 | Piezoresistive gage | ||
| US3049685A (en) * | 1960-05-18 | 1962-08-14 | Electro Optical Systems Inc | Electrical strain transducer |
| US3186217A (en) * | 1960-12-02 | 1965-06-01 | Bell Telephone Labor Inc | Piezoresistive stress transducer |
| US3251222A (en) * | 1961-04-20 | 1966-05-17 | Gen Electric | Strain sensitive apparatus and elements therefor |
| US3292128A (en) * | 1961-12-26 | 1966-12-13 | Gen Electric | Semiconductor strain sensitive devices |
| US3230763A (en) * | 1962-12-27 | 1966-01-25 | Honeywell Inc | Semiconductor pressure diaphragm |
| US3402609A (en) * | 1964-09-29 | 1968-09-24 | Tokota Chuo Kenkyusho Kk | Semiconductor mechanical-to-electrical transducer |
-
1970
- 1970-05-20 US US38940A patent/US3641812A/en not_active Expired - Lifetime
-
1971
- 1971-05-13 DE DE2123690A patent/DE2123690B2/de not_active Ceased
- 1971-05-17 SE SE7106377A patent/SE380623B/xx unknown
- 1971-05-19 FR FR7118298A patent/FR2091825A5/fr not_active Expired
- 1971-05-20 GB GB1296641D patent/GB1296641A/en not_active Expired
- 1971-05-20 JP JP46034387A patent/JPS5232236B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2123690A1 (de) | 1971-12-09 |
| DE2123690B2 (de) | 1979-04-05 |
| SE380623B (sv) | 1975-11-10 |
| GB1296641A (cg-RX-API-DMAC10.html) | 1972-11-15 |
| JPS5232236B1 (cg-RX-API-DMAC10.html) | 1977-08-19 |
| US3641812A (en) | 1972-02-15 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |