FR2087652A5 - - Google Patents

Info

Publication number
FR2087652A5
FR2087652A5 FR7019276A FR7019276A FR2087652A5 FR 2087652 A5 FR2087652 A5 FR 2087652A5 FR 7019276 A FR7019276 A FR 7019276A FR 7019276 A FR7019276 A FR 7019276A FR 2087652 A5 FR2087652 A5 FR 2087652A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7019276A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Priority to FR7019276A priority Critical patent/FR2087652A5/fr
Priority to US00144078A priority patent/US3798447A/en
Application granted granted Critical
Publication of FR2087652A5 publication Critical patent/FR2087652A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7019276A 1970-05-27 1970-05-27 Expired FR2087652A5 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR7019276A FR2087652A5 (fr) 1970-05-27 1970-05-27
US00144078A US3798447A (en) 1970-05-27 1971-05-17 Apparatus for directing an energizing beam on a sample to cause secondary ion emission

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7019276A FR2087652A5 (fr) 1970-05-27 1970-05-27

Publications (1)

Publication Number Publication Date
FR2087652A5 true FR2087652A5 (fr) 1971-12-31

Family

ID=9056188

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7019276A Expired FR2087652A5 (fr) 1970-05-27 1970-05-27

Country Status (2)

Country Link
US (1) US3798447A (fr)
FR (1) FR2087652A5 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0155700B1 (fr) * 1984-03-22 1990-01-31 Nippon Telegraph And Telephone Corporation Appareil de spectrométrie quantitative de masse des ions secondaires
US4556794A (en) * 1985-01-30 1985-12-03 Hughes Aircraft Company Secondary ion collection and transport system for ion microprobe
GB8614177D0 (en) * 1986-06-11 1986-07-16 Vg Instr Group Glow discharge mass spectrometer
US7259373B2 (en) * 2005-07-08 2007-08-21 Nexgensemi Holdings Corporation Apparatus and method for controlled particle beam manufacturing
WO2008140585A1 (fr) 2006-11-22 2008-11-20 Nexgen Semi Holding, Inc. Appareil et procédé de fabrication de masque conforme
GB0714301D0 (en) * 2007-07-21 2007-08-29 Ionoptika Ltd Secondary ion mass spectrometry and secondary neutral mass spectrometry using a multiple-plate buncher
US10991545B2 (en) 2008-06-30 2021-04-27 Nexgen Semi Holding, Inc. Method and device for spatial charged particle bunching
US10566169B1 (en) 2008-06-30 2020-02-18 Nexgen Semi Holding, Inc. Method and device for spatial charged particle bunching

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3005099A (en) * 1957-10-26 1961-10-17 Centre Nat Rech Scient X-ray diffractograph enabling diagrams to be taken at very high temperatures
NL231361A (fr) * 1958-09-13
US3415985A (en) * 1962-11-28 1968-12-10 Centre Nat Rech Scient Ionic microanalyzer wherein secondary ions are emitted from a sample surface upon bombardment by neutral atoms
FR1352167A (fr) * 1962-11-28 1964-02-14 Ct Nat De La Rech Scient Et Cs Nouveau dispositif de microanalyse par émission ionique secondaire
US3418465A (en) * 1965-08-17 1968-12-24 Zeiss Jena Veb Carl Radiation source for reducing specimen contamination in electron microscopes
US3517191A (en) * 1965-10-11 1970-06-23 Helmut J Liebl Scanning ion microscope with magnetic sector lens to purify the primary ion beam
NL6611941A (fr) * 1966-08-25 1968-02-26

Also Published As

Publication number Publication date
US3798447A (en) 1974-03-19

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Legal Events

Date Code Title Description
ST Notification of lapse