FR2082091A5 - - Google Patents

Info

Publication number
FR2082091A5
FR2082091A5 FR7007542A FR7007542A FR2082091A5 FR 2082091 A5 FR2082091 A5 FR 2082091A5 FR 7007542 A FR7007542 A FR 7007542A FR 7007542 A FR7007542 A FR 7007542A FR 2082091 A5 FR2082091 A5 FR 2082091A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7007542A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7007542A priority Critical patent/FR2082091A5/fr
Application granted granted Critical
Publication of FR2082091A5 publication Critical patent/FR2082091A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR7007542A 1970-03-03 1970-03-03 Expired FR2082091A5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7007542A FR2082091A5 (en) 1970-03-03 1970-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7007542A FR2082091A5 (en) 1970-03-03 1970-03-03

Publications (1)

Publication Number Publication Date
FR2082091A5 true FR2082091A5 (en) 1971-12-10

Family

ID=9051568

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7007542A Expired FR2082091A5 (en) 1970-03-03 1970-03-03

Country Status (1)

Country Link
FR (1) FR2082091A5 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0002406A1 (en) * 1977-11-28 1979-06-13 ANVAR Agence Nationale de Valorisation de la Recherche Ion source, in particular for an ion implantation device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0002406A1 (en) * 1977-11-28 1979-06-13 ANVAR Agence Nationale de Valorisation de la Recherche Ion source, in particular for an ion implantation device

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Legal Events

Date Code Title Description
ST Notification of lapse