FR2082065A5 - - Google Patents

Info

Publication number
FR2082065A5
FR2082065A5 FR7007415A FR7007415A FR2082065A5 FR 2082065 A5 FR2082065 A5 FR 2082065A5 FR 7007415 A FR7007415 A FR 7007415A FR 7007415 A FR7007415 A FR 7007415A FR 2082065 A5 FR2082065 A5 FR 2082065A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7007415A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7007415A priority Critical patent/FR2082065A5/fr
Application granted granted Critical
Publication of FR2082065A5 publication Critical patent/FR2082065A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR7007415A 1970-03-02 1970-03-02 Expired FR2082065A5 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7007415A FR2082065A5 (enExample) 1970-03-02 1970-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7007415A FR2082065A5 (enExample) 1970-03-02 1970-03-02

Publications (1)

Publication Number Publication Date
FR2082065A5 true FR2082065A5 (enExample) 1971-12-10

Family

ID=9051513

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7007415A Expired FR2082065A5 (enExample) 1970-03-02 1970-03-02

Country Status (1)

Country Link
FR (1) FR2082065A5 (enExample)

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Legal Events

Date Code Title Description
ST Notification of lapse