FR2081941A1 - - Google Patents

Info

Publication number
FR2081941A1
FR2081941A1 FR7108890A FR7108890A FR2081941A1 FR 2081941 A1 FR2081941 A1 FR 2081941A1 FR 7108890 A FR7108890 A FR 7108890A FR 7108890 A FR7108890 A FR 7108890A FR 2081941 A1 FR2081941 A1 FR 2081941A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7108890A
Other languages
French (fr)
Other versions
FR2081941B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GL ENG CO Ltd
Original Assignee
GL ENG CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GL ENG CO Ltd filed Critical GL ENG CO Ltd
Publication of FR2081941A1 publication Critical patent/FR2081941A1/fr
Application granted granted Critical
Publication of FR2081941B1 publication Critical patent/FR2081941B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00—Analogue/digital conversion; Digital/analogue conversion
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00—Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12—Analogue/digital converters
    • H03M1/124—Sampling or signal conditioning arrangements specially adapted for A/D converters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
FR7108890A 1970-03-13 1971-03-15 Expired FR2081941B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1210470 1970-03-13

Publications (2)

Publication Number Publication Date
FR2081941A1 true FR2081941A1 (enrdf_load_stackoverflow) 1971-12-10
FR2081941B1 FR2081941B1 (enrdf_load_stackoverflow) 1973-10-19

Family

ID=9998464

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7108890A Expired FR2081941B1 (enrdf_load_stackoverflow) 1970-03-13 1971-03-15

Country Status (2)

Country Link
DE (1) DE2112063A1 (enrdf_load_stackoverflow)
FR (1) FR2081941B1 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB964343A (en) * 1960-07-21 1964-07-22 Ibm Apparatus for controlling the rate of deposition of an evaporated material

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB964343A (en) * 1960-07-21 1964-07-22 Ibm Apparatus for controlling the rate of deposition of an evaporated material

Also Published As

Publication number Publication date
FR2081941B1 (enrdf_load_stackoverflow) 1973-10-19
DE2112063A1 (de) 1971-11-11

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Legal Events

Date Code Title Description
ST Notification of lapse