FR2071788A5 - - Google Patents
Info
- Publication number
- FR2071788A5 FR2071788A5 FR7037876A FR7037876A FR2071788A5 FR 2071788 A5 FR2071788 A5 FR 2071788A5 FR 7037876 A FR7037876 A FR 7037876A FR 7037876 A FR7037876 A FR 7037876A FR 2071788 A5 FR2071788 A5 FR 2071788A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
- Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US88027369A | 1969-11-26 | 1969-11-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2071788A5 true FR2071788A5 (en) | 1971-09-17 |
Family
ID=25375921
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7037876A Expired FR2071788A5 (en) | 1969-11-26 | 1970-10-13 |
Country Status (5)
Country | Link |
---|---|
US (1) | US3621213A (en) |
CA (1) | CA935743A (en) |
DE (1) | DE2047198C3 (en) |
FR (1) | FR2071788A5 (en) |
GB (1) | GB1311558A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0134680A2 (en) * | 1983-07-29 | 1985-03-20 | Kabushiki Kaisha Toshiba | Apparatus for manufacturing a single crystal |
FR2553793A1 (en) * | 1983-10-19 | 1985-04-26 | Crismatec | METHOD FOR CONTROLLING SINGLE CRYSTAL DRAWING MACHINE |
EP0285943A1 (en) * | 1987-03-31 | 1988-10-12 | Shin-Etsu Handotai Company, Limited | Crystal diameter controlling method |
EP0444628A1 (en) * | 1990-02-28 | 1991-09-04 | Shin-Etsu Handotai Company Limited | Method of automatic control of growing neck portion of a single crystal by the CZ method |
EP0499220A1 (en) * | 1991-02-14 | 1992-08-19 | Shin-Etsu Handotai Company, Limited | Automatic control method for growing single-crystal neck portions |
EP0536405A1 (en) * | 1991-04-26 | 1993-04-14 | Mitsubishi Materials Corporation | Process for pulling up single crystal |
USRE34375E (en) * | 1987-05-05 | 1993-09-14 | Mobil Solar Energy Corporation | System for controlling apparatus for growing tubular crystalline bodies |
WO2000022201A1 (en) * | 1998-10-14 | 2000-04-20 | Memc Electronic Materials, Inc. | Method and apparatus for accurately pulling a crystal |
US6726764B2 (en) | 2000-02-01 | 2004-04-27 | Memc Electronic Materials, Inc. | Method for controlling growth of a silicon crystal to minimize growth rate and diameter deviations |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3805044A (en) * | 1971-04-07 | 1974-04-16 | Western Electric Co | Computerized process control system for the growth of synthetic quartz crystals |
US3740563A (en) * | 1971-06-25 | 1973-06-19 | Monsanto Co | Electroptical system and method for sensing and controlling the diameter and melt level of pulled crystals |
JPS5027480B1 (en) * | 1971-07-28 | 1975-09-08 | ||
US3761692A (en) * | 1971-10-01 | 1973-09-25 | Texas Instruments Inc | Automated crystal pulling system |
US3870477A (en) * | 1972-07-10 | 1975-03-11 | Tyco Laboratories Inc | Optical control of crystal growth |
US3882319A (en) * | 1973-10-23 | 1975-05-06 | Motorola Inc | Automatic melt level control for growth of semiconductor crystals |
US3998598A (en) * | 1973-11-23 | 1976-12-21 | Semimetals, Inc. | Automatic diameter control for crystal growing facilities |
GB1478192A (en) * | 1974-03-29 | 1977-06-29 | Nat Res Dev | Automatically controlled crystal growth |
GB1465191A (en) * | 1974-03-29 | 1977-02-23 | Nat Res Dev | Automatically controlled crystal growth |
DE2446293C2 (en) * | 1974-04-03 | 1986-01-30 | National Research Development Corp., London | Device for regulating the rod cross-section during Czochralski drawing |
US4207293A (en) * | 1974-06-14 | 1980-06-10 | Varian Associates, Inc. | Circumferential error signal apparatus for crystal rod pulling |
US4350557A (en) * | 1974-06-14 | 1982-09-21 | Ferrofluidics Corporation | Method for circumferential dimension measuring and control in crystal rod pulling |
US4025386A (en) * | 1974-12-20 | 1977-05-24 | Union Carbide Corporation | Method for producing r-plane single crystal alpha alumina in massive form having substantially circular cross-section |
DE2516197C3 (en) * | 1975-04-14 | 1982-02-04 | Schweizerische Aluminium AG, 3965 Chippis | Weighing device for automatic control of the diameter of a crystal when pulling it out of a crucible |
US4058429A (en) * | 1975-12-04 | 1977-11-15 | Westinghouse Electric Corporation | Infrared temperature control of Czochralski crystal growth |
US4080172A (en) * | 1975-12-29 | 1978-03-21 | Monsanto Company | Zone refiner automatic control |
US4289572A (en) * | 1976-12-27 | 1981-09-15 | Dow Corning Corporation | Method of closing silicon tubular bodies |
US4135204A (en) * | 1977-06-09 | 1979-01-16 | Chesebrough-Pond's Inc. | Automatic glass blowing apparatus and method |
DE3069547D1 (en) * | 1980-06-26 | 1984-12-06 | Ibm | Process for controlling the oxygen content of silicon ingots pulled by the czochralski method |
US4511428A (en) * | 1982-07-09 | 1985-04-16 | International Business Machines Corporation | Method of controlling oxygen content and distribution in grown silicon crystals |
US4633954A (en) * | 1983-12-05 | 1987-01-06 | Otis Engineering Corporation | Well production controller system |
DE3480721D1 (en) * | 1984-08-31 | 1990-01-18 | Gakei Denki Seisakusho | METHOD AND DEVICE FOR PRODUCING SINGLE CRYSTALS. |
US4794534A (en) * | 1985-08-08 | 1988-12-27 | Amoco Corporation | Method of drilling a well utilizing predictive simulation with real time data |
GB8715327D0 (en) * | 1987-06-30 | 1987-08-05 | Secr Defence | Growth of semiconductor singel crystals |
JP2678383B2 (en) * | 1989-05-30 | 1997-11-17 | 信越半導体 株式会社 | Device for single crystal |
US5325229A (en) * | 1993-05-10 | 1994-06-28 | Phillips Petroleum Company | Temperature control of crystals used in optical oscillators |
US5560759A (en) * | 1994-11-14 | 1996-10-01 | Lucent Technologies Inc. | Core insertion method for making optical fiber preforms and optical fibers fabricated therefrom |
JP2966322B2 (en) * | 1995-02-27 | 1999-10-25 | 三菱マテリアルシリコン株式会社 | Silicon single crystal ingot and manufacturing method thereof |
US5888299A (en) * | 1995-12-27 | 1999-03-30 | Shin-Etsu Handotai Co., Ltd. | Apparatus for adjusting initial position of melt surface |
JPH09255485A (en) * | 1996-03-15 | 1997-09-30 | Shin Etsu Handotai Co Ltd | Production of single crystal and seed crystal |
DE69601424T2 (en) * | 1996-06-27 | 1999-06-02 | Wacker Siltronic Halbleitermat | Method and device for controlling crystal growth |
JP3444178B2 (en) * | 1998-02-13 | 2003-09-08 | 信越半導体株式会社 | Single crystal manufacturing method |
US6560514B1 (en) | 1999-09-23 | 2003-05-06 | Kic Thermal Profiling | Method and apparatus for optimizing control of a part temperature in conveyorized thermal processor |
US6453219B1 (en) | 1999-09-23 | 2002-09-17 | Kic Thermal Profiling | Method and apparatus for controlling temperature response of a part in a conveyorized thermal processor |
US6283379B1 (en) | 2000-02-14 | 2001-09-04 | Kic Thermal Profiling | Method for correlating processor and part temperatures using an air temperature sensor for a conveyorized thermal processor |
CN103764880B (en) * | 2011-08-26 | 2016-10-26 | 康萨克公司 | Consumable electrode vacuum arc smelting process is utilized to carry out refine metalloid |
US11414778B2 (en) | 2019-07-29 | 2022-08-16 | Globalwafers Co., Ltd. | Production and use of dynamic state charts when growing a single crystal silicon ingot |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3246550A (en) * | 1959-11-02 | 1966-04-19 | Pittsburgh Plate Glass Co | Length and area partitioning methods and apparatus |
-
1969
- 1969-11-26 US US880273A patent/US3621213A/en not_active Expired - Lifetime
-
1970
- 1970-09-25 DE DE2047198A patent/DE2047198C3/en not_active Expired
- 1970-10-13 FR FR7037876A patent/FR2071788A5/fr not_active Expired
- 1970-11-09 GB GB5315670A patent/GB1311558A/en not_active Expired
- 1970-11-19 CA CA098537A patent/CA935743A/en not_active Expired
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0134680A3 (en) * | 1983-07-29 | 1987-07-15 | Kabushiki Kaisha Toshiba | Apparatus for manufacturing a single crystal |
EP0134680A2 (en) * | 1983-07-29 | 1985-03-20 | Kabushiki Kaisha Toshiba | Apparatus for manufacturing a single crystal |
FR2553793A1 (en) * | 1983-10-19 | 1985-04-26 | Crismatec | METHOD FOR CONTROLLING SINGLE CRYSTAL DRAWING MACHINE |
EP0142415A2 (en) * | 1983-10-19 | 1985-05-22 | Commissariat A L'energie Atomique | Contol process for a single crystal pulling apparatus |
EP0142415A3 (en) * | 1983-10-19 | 1985-06-19 | Crismatec | Contol process for a single crystal pulling apparatus |
EP0285943A1 (en) * | 1987-03-31 | 1988-10-12 | Shin-Etsu Handotai Company, Limited | Crystal diameter controlling method |
USRE34375E (en) * | 1987-05-05 | 1993-09-14 | Mobil Solar Energy Corporation | System for controlling apparatus for growing tubular crystalline bodies |
EP0444628A1 (en) * | 1990-02-28 | 1991-09-04 | Shin-Etsu Handotai Company Limited | Method of automatic control of growing neck portion of a single crystal by the CZ method |
US5183528A (en) * | 1990-02-28 | 1993-02-02 | Shin-Etsu Handotai Company, Limited | Method of automatic control of growing neck portion of a single crystal by the cz method |
EP0499220A1 (en) * | 1991-02-14 | 1992-08-19 | Shin-Etsu Handotai Company, Limited | Automatic control method for growing single-crystal neck portions |
US5288363A (en) * | 1991-02-14 | 1994-02-22 | Shin-Etsu Handotai Company, Ltd. | Automatic control method for growing single-crystal neck portions |
EP0536405A1 (en) * | 1991-04-26 | 1993-04-14 | Mitsubishi Materials Corporation | Process for pulling up single crystal |
EP0536405A4 (en) * | 1991-04-26 | 1995-11-15 | Mitsubishi Materials Corp | Process for pulling up single crystal |
WO2000022201A1 (en) * | 1998-10-14 | 2000-04-20 | Memc Electronic Materials, Inc. | Method and apparatus for accurately pulling a crystal |
US6726764B2 (en) | 2000-02-01 | 2004-04-27 | Memc Electronic Materials, Inc. | Method for controlling growth of a silicon crystal to minimize growth rate and diameter deviations |
Also Published As
Publication number | Publication date |
---|---|
GB1311558A (en) | 1973-03-28 |
DE2047198B2 (en) | 1973-09-13 |
DE2047198C3 (en) | 1974-04-25 |
DE2047198A1 (en) | 1971-07-29 |
CA935743A (en) | 1973-10-23 |
US3621213A (en) | 1971-11-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |