FR2056144A5 - - Google Patents
Info
- Publication number
- FR2056144A5 FR2056144A5 FR7008651A FR7008651A FR2056144A5 FR 2056144 A5 FR2056144 A5 FR 2056144A5 FR 7008651 A FR7008651 A FR 7008651A FR 7008651 A FR7008651 A FR 7008651A FR 2056144 A5 FR2056144 A5 FR 2056144A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1937482A DE1937482C3 (en) | 1969-07-23 | 1969-07-23 | Microbeam probe |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2056144A5 true FR2056144A5 (en) | 1971-05-14 |
Family
ID=5740684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7008651A Expired FR2056144A5 (en) | 1969-07-23 | 1970-03-11 |
Country Status (4)
Country | Link |
---|---|
US (1) | US3617739A (en) |
DE (1) | DE1937482C3 (en) |
FR (1) | FR2056144A5 (en) |
GB (1) | GB1325551A (en) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3878392A (en) * | 1973-12-17 | 1975-04-15 | Etec Corp | Specimen analysis with ion and electrom beams |
US4352985A (en) * | 1974-01-08 | 1982-10-05 | Martin Frederick W | Scanning ion microscope |
US4236073A (en) * | 1977-05-27 | 1980-11-25 | Martin Frederick W | Scanning ion microscope |
JPS583588B2 (en) * | 1978-02-03 | 1983-01-21 | 株式会社日立製作所 | Ion↓-electronic combined analyzer |
JPS57191950A (en) * | 1981-05-22 | 1982-11-25 | Hitachi Ltd | Charged-particle source |
JPS58110956U (en) * | 1982-01-22 | 1983-07-28 | 株式会社日立製作所 | Charged particle irradiation device |
GB2115976A (en) * | 1982-02-26 | 1983-09-14 | Philips Electronic Associated | Charged particle beam apparatus |
EP0107320A3 (en) * | 1982-09-17 | 1986-11-20 | Dubilier Scientific Limited | Improvements relating to ion-beam apparatus |
GB8401471D0 (en) * | 1984-01-19 | 1984-02-22 | Cleaver J R A | Ion and electron beam electrostatic lens systems |
GB8401578D0 (en) * | 1984-01-19 | 1984-02-22 | Cleaver J R A | Ion and electron beam electrostatic and magnetic lens systems |
FR2575597B1 (en) * | 1984-12-28 | 1987-03-20 | Onera (Off Nat Aerospatiale) | APPARATUS FOR VERY HIGH RESOLUTION ION MICROANALYSIS OF A SOLID SAMPLE |
US4829179A (en) * | 1986-07-12 | 1989-05-09 | Nissin Electric Company, Limited | Surface analyzer |
JP2811073B2 (en) * | 1988-11-01 | 1998-10-15 | セイコーインスツルメンツ株式会社 | Cross section processing observation device |
US5204530A (en) * | 1991-12-27 | 1993-04-20 | Philippe Chastagner | Noise reduction in negative-ion quadrupole mass spectrometry |
US5849252A (en) * | 1995-03-06 | 1998-12-15 | Mitsubishi Jukogyo Kabushiki Kaisha | Charged particle accelerator apparatus and electronic sterilizer apparatus using the same |
IL122770A0 (en) | 1997-12-25 | 1998-08-16 | Gotit Ltd | Automatic spray dispenser |
EP1388883B1 (en) * | 2002-08-07 | 2013-06-05 | Fei Company | Coaxial FIB-SEM column |
GB2428868B (en) * | 2005-10-28 | 2008-11-19 | Thermo Electron Corp | Spectrometer for surface analysis and method therefor |
CN103107056B (en) * | 2011-11-10 | 2014-07-16 | 北京中科信电子装备有限公司 | Broadband ion beam analyzer |
CN107843775B (en) * | 2017-12-20 | 2024-02-27 | 中国科学院大气物理研究所 | Three-dimensional electric field sonde capable of sensing thunderstorm cloud in gesture |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2591998A (en) * | 1947-07-29 | 1952-04-08 | Atomic Energy Commission | Leak detector |
US2975279A (en) * | 1958-06-23 | 1961-03-14 | Vickers Electrical Co Ltd | Mass spectrometers |
NL285301A (en) * | 1961-11-15 | |||
US3517191A (en) * | 1965-10-11 | 1970-06-23 | Helmut J Liebl | Scanning ion microscope with magnetic sector lens to purify the primary ion beam |
US3480774A (en) * | 1967-05-26 | 1969-11-25 | Minnesota Mining & Mfg | Low-energy ion scattering apparatus and method for analyzing the surface of a solid |
-
1969
- 1969-07-23 DE DE1937482A patent/DE1937482C3/en not_active Expired
-
1970
- 1970-03-11 FR FR7008651A patent/FR2056144A5/fr not_active Expired
- 1970-04-09 US US26893A patent/US3617739A/en not_active Expired - Lifetime
- 1970-07-07 GB GB3298770A patent/GB1325551A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE1937482B2 (en) | 1974-02-14 |
US3617739A (en) | 1971-11-02 |
GB1325551A (en) | 1973-08-01 |
DE1937482A1 (en) | 1971-02-04 |
DE1937482C3 (en) | 1974-10-10 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |