FR2056144A5 - - Google Patents

Info

Publication number
FR2056144A5
FR2056144A5 FR7008651A FR7008651A FR2056144A5 FR 2056144 A5 FR2056144 A5 FR 2056144A5 FR 7008651 A FR7008651 A FR 7008651A FR 7008651 A FR7008651 A FR 7008651A FR 2056144 A5 FR2056144 A5 FR 2056144A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7008651A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INST PLASMAPHYSIK
Original Assignee
INST PLASMAPHYSIK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INST PLASMAPHYSIK filed Critical INST PLASMAPHYSIK
Application granted granted Critical
Publication of FR2056144A5 publication Critical patent/FR2056144A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
FR7008651A 1969-07-23 1970-03-11 Expired FR2056144A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1937482A DE1937482C3 (en) 1969-07-23 1969-07-23 Microbeam probe

Publications (1)

Publication Number Publication Date
FR2056144A5 true FR2056144A5 (en) 1971-05-14

Family

ID=5740684

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7008651A Expired FR2056144A5 (en) 1969-07-23 1970-03-11

Country Status (4)

Country Link
US (1) US3617739A (en)
DE (1) DE1937482C3 (en)
FR (1) FR2056144A5 (en)
GB (1) GB1325551A (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3878392A (en) * 1973-12-17 1975-04-15 Etec Corp Specimen analysis with ion and electrom beams
US4352985A (en) * 1974-01-08 1982-10-05 Martin Frederick W Scanning ion microscope
US4236073A (en) * 1977-05-27 1980-11-25 Martin Frederick W Scanning ion microscope
JPS583588B2 (en) * 1978-02-03 1983-01-21 株式会社日立製作所 Ion↓-electronic combined analyzer
JPS57191950A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Charged-particle source
JPS58110956U (en) * 1982-01-22 1983-07-28 株式会社日立製作所 Charged particle irradiation device
GB2115976A (en) * 1982-02-26 1983-09-14 Philips Electronic Associated Charged particle beam apparatus
EP0107320A3 (en) * 1982-09-17 1986-11-20 Dubilier Scientific Limited Improvements relating to ion-beam apparatus
GB8401471D0 (en) * 1984-01-19 1984-02-22 Cleaver J R A Ion and electron beam electrostatic lens systems
GB8401578D0 (en) * 1984-01-19 1984-02-22 Cleaver J R A Ion and electron beam electrostatic and magnetic lens systems
FR2575597B1 (en) * 1984-12-28 1987-03-20 Onera (Off Nat Aerospatiale) APPARATUS FOR VERY HIGH RESOLUTION ION MICROANALYSIS OF A SOLID SAMPLE
US4829179A (en) * 1986-07-12 1989-05-09 Nissin Electric Company, Limited Surface analyzer
JP2811073B2 (en) * 1988-11-01 1998-10-15 セイコーインスツルメンツ株式会社 Cross section processing observation device
US5204530A (en) * 1991-12-27 1993-04-20 Philippe Chastagner Noise reduction in negative-ion quadrupole mass spectrometry
US5849252A (en) * 1995-03-06 1998-12-15 Mitsubishi Jukogyo Kabushiki Kaisha Charged particle accelerator apparatus and electronic sterilizer apparatus using the same
IL122770A0 (en) 1997-12-25 1998-08-16 Gotit Ltd Automatic spray dispenser
EP1388883B1 (en) * 2002-08-07 2013-06-05 Fei Company Coaxial FIB-SEM column
GB2428868B (en) * 2005-10-28 2008-11-19 Thermo Electron Corp Spectrometer for surface analysis and method therefor
CN103107056B (en) * 2011-11-10 2014-07-16 北京中科信电子装备有限公司 Broadband ion beam analyzer
CN107843775B (en) * 2017-12-20 2024-02-27 中国科学院大气物理研究所 Three-dimensional electric field sonde capable of sensing thunderstorm cloud in gesture

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2591998A (en) * 1947-07-29 1952-04-08 Atomic Energy Commission Leak detector
US2975279A (en) * 1958-06-23 1961-03-14 Vickers Electrical Co Ltd Mass spectrometers
NL285301A (en) * 1961-11-15
US3517191A (en) * 1965-10-11 1970-06-23 Helmut J Liebl Scanning ion microscope with magnetic sector lens to purify the primary ion beam
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid

Also Published As

Publication number Publication date
DE1937482B2 (en) 1974-02-14
US3617739A (en) 1971-11-02
GB1325551A (en) 1973-08-01
DE1937482A1 (en) 1971-02-04
DE1937482C3 (en) 1974-10-10

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Legal Events

Date Code Title Description
ST Notification of lapse