FR2052372A5 - - Google Patents

Info

Publication number
FR2052372A5
FR2052372A5 FR7017087A FR7017087A FR2052372A5 FR 2052372 A5 FR2052372 A5 FR 2052372A5 FR 7017087 A FR7017087 A FR 7017087A FR 7017087 A FR7017087 A FR 7017087A FR 2052372 A5 FR2052372 A5 FR 2052372A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7017087A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR2052372A5 publication Critical patent/FR2052372A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/11—Vacuum
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/17—Socket type
    • Y10T279/17231—Pivoted jaws
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/18—Pivoted jaw

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
FR7017087A 1969-06-19 1970-05-12 Expired FR2052372A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83478369A 1969-06-19 1969-06-19

Publications (1)

Publication Number Publication Date
FR2052372A5 true FR2052372A5 (fr) 1971-04-09

Family

ID=25267795

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7017087A Expired FR2052372A5 (fr) 1969-06-19 1970-05-12

Country Status (3)

Country Link
US (1) US3572736A (fr)
DE (1) DE2027984A1 (fr)
FR (1) FR2052372A5 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3711081A (en) * 1970-03-31 1973-01-16 Ibm Semiconductor wafer chuck
WO1989001732A1 (fr) * 1987-08-14 1989-02-23 Asem Gmbh Element de suspension d'un bras de manutention
US5023426A (en) * 1989-06-21 1991-06-11 Honeywell Inc. Robotic laser soldering apparatus for automated surface assembly of microscopic components
US5233152A (en) * 1989-06-21 1993-08-03 Honeywell Inc. Robotic laser soldering apparatus for automated surface assembly of microscopic components
US5813517A (en) * 1996-02-12 1998-09-29 Chase-Logeman Corporation Vibratory parts feeding system
KR100590554B1 (ko) * 2004-05-28 2006-06-19 삼성전자주식회사 반응용기 및 시편홀더의 구조가 개선된 단원자층 증착장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1351447A (en) * 1918-10-16 1920-08-31 Otto A Sorensen Self-opening die
US3333274A (en) * 1965-04-21 1967-07-25 Micro Tech Mfg Inc Testing device
US3475097A (en) * 1966-04-11 1969-10-28 Motorola Inc Mask alignment tool

Also Published As

Publication number Publication date
DE2027984A1 (de) 1970-12-23
US3572736A (en) 1971-03-30

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Legal Events

Date Code Title Description
ST Notification of lapse