FR2051832A1 - Polishing both sides of an integrated circuit - plate simultaneously - Google Patents

Polishing both sides of an integrated circuit - plate simultaneously

Info

Publication number
FR2051832A1
FR2051832A1 FR7026027A FR7026027A FR2051832A1 FR 2051832 A1 FR2051832 A1 FR 2051832A1 FR 7026027 A FR7026027 A FR 7026027A FR 7026027 A FR7026027 A FR 7026027A FR 2051832 A1 FR2051832 A1 FR 2051832A1
Authority
FR
France
Prior art keywords
polishing
sides
integrated circuit
plate simultaneously
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7026027A
Other languages
French (fr)
Other versions
FR2051832B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of FR2051832A1 publication Critical patent/FR2051832A1/en
Application granted granted Critical
Publication of FR2051832B1 publication Critical patent/FR2051832B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The apparatus comprises a workpiece mounting with a pair of polishing surfaces arranged on either side, and devices for moving the mounting and the surfaces in relationship to each other. Specifically, the mounting body consists of polyethylene terephthalate and/or P.T.F.E.
FR7026027A 1969-07-18 1970-07-15 Polishing both sides of an integrated circuit - plate simultaneously Granted FR2051832A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US84284269A 1969-07-18 1969-07-18

Publications (2)

Publication Number Publication Date
FR2051832A1 true FR2051832A1 (en) 1971-04-09
FR2051832B1 FR2051832B1 (en) 1973-04-27

Family

ID=25288376

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7026027A Granted FR2051832A1 (en) 1969-07-18 1970-07-15 Polishing both sides of an integrated circuit - plate simultaneously

Country Status (3)

Country Link
DE (1) DE2034924A1 (en)
FR (1) FR2051832A1 (en)
NL (1) NL7010086A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531582A (en) * 1978-08-15 1980-03-05 Ibm Free polishing device
JPH02190258A (en) * 1989-01-20 1990-07-26 Nkk Corp Double polishing method for titanium plate

Also Published As

Publication number Publication date
FR2051832B1 (en) 1973-04-27
DE2034924A1 (en) 1971-02-04
NL7010086A (en) 1971-01-20

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Legal Events

Date Code Title Description
ST Notification of lapse