FR2046821A1 - - Google Patents

Info

Publication number
FR2046821A1
FR2046821A1 FR7022145A FR7022145A FR2046821A1 FR 2046821 A1 FR2046821 A1 FR 2046821A1 FR 7022145 A FR7022145 A FR 7022145A FR 7022145 A FR7022145 A FR 7022145A FR 2046821 A1 FR2046821 A1 FR 2046821A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7022145A
Other versions
FR2046821B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Publication of FR2046821A1 publication Critical patent/FR2046821A1/fr
Application granted granted Critical
Publication of FR2046821B1 publication Critical patent/FR2046821B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7022145A 1969-06-17 1970-06-16 Expired FR2046821B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3065869 1969-06-17

Publications (2)

Publication Number Publication Date
FR2046821A1 true FR2046821A1 (fr) 1971-03-12
FR2046821B1 FR2046821B1 (fr) 1973-01-12

Family

ID=10311081

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7022145A Expired FR2046821B1 (fr) 1969-06-17 1970-06-16

Country Status (2)

Country Link
DE (1) DE2029534A1 (fr)
FR (1) FR2046821B1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1557866A1 (fr) * 2004-01-21 2005-07-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Composants d'optique corpusculaire avec lentille optique à particules

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1557866A1 (fr) * 2004-01-21 2005-07-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Composants d'optique corpusculaire avec lentille optique à particules
WO2005071709A2 (fr) * 2004-01-21 2005-08-04 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Composant optique pour faisceau comportant une lentille pour particules chargees
WO2005071709A3 (fr) * 2004-01-21 2005-12-15 Integrated Circuit Testing Composant optique pour faisceau comportant une lentille pour particules chargees
US8445846B2 (en) 2004-01-21 2013-05-21 Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh Beam optical component having a charged particle lens

Also Published As

Publication number Publication date
FR2046821B1 (fr) 1973-01-12
DE2029534A1 (de) 1971-03-25

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Legal Events

Date Code Title Description
ST Notification of lapse