FR1590291A - - Google Patents

Info

Publication number
FR1590291A
FR1590291A FR1590291DA FR1590291A FR 1590291 A FR1590291 A FR 1590291A FR 1590291D A FR1590291D A FR 1590291DA FR 1590291 A FR1590291 A FR 1590291A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1590291A publication Critical patent/FR1590291A/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252Tubes for spot-analysing by electron or ion beams; Microanalysers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/145Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using chemical ionisation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
FR1590291D 1967-10-30 1968-10-29 Expired FR1590291A (enExample)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US67884067A 1967-10-30 1967-10-30
US75382268A 1968-07-12 1968-07-12

Publications (1)

Publication Number Publication Date
FR1590291A true FR1590291A (enExample) 1970-04-13

Family

ID=27102105

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1590291D Expired FR1590291A (enExample) 1967-10-30 1968-10-29

Country Status (4)

Country Link
JP (1) JPS4823478B1 (enExample)
DE (1) DE1806113B2 (enExample)
FR (1) FR1590291A (enExample)
GB (1) GB1213534A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51154569U (enExample) * 1975-06-02 1976-12-09

Also Published As

Publication number Publication date
DE1806113A1 (de) 1969-10-16
JPS4823478B1 (enExample) 1973-07-13
DE1806113B2 (de) 1973-02-08
GB1213534A (en) 1970-11-25

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Legal Events

Date Code Title Description
ST Notification of lapse