FR1579614A - - Google Patents

Info

Publication number
FR1579614A
FR1579614A FR1579614DA FR1579614A FR 1579614 A FR1579614 A FR 1579614A FR 1579614D A FR1579614D A FR 1579614DA FR 1579614 A FR1579614 A FR 1579614A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PL121133A external-priority patent/PL57197B1/pl
Application filed filed Critical
Application granted granted Critical
Publication of FR1579614A publication Critical patent/FR1579614A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9505—Wafer internal defects, e.g. microcracks

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
FR1579614D 1967-06-14 1968-06-14 Expired FR1579614A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL121133A PL57197B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1967-06-14

Publications (1)

Publication Number Publication Date
FR1579614A true FR1579614A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1969-08-29

Family

ID=19949682

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1579614D Expired FR1579614A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1967-06-14 1968-06-14

Country Status (5)

Country Link
US (1) US3569699A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE1772636A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR1579614A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1198871A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL6808359A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2713125A (en) * 1952-11-22 1955-07-12 Gen Electric Integrating X-ray goniometer
US2907883A (en) * 1955-04-05 1959-10-06 Gen Electric Translation system
US3434332A (en) * 1965-07-26 1969-03-25 Automation Ind Inc Nondestructive tester

Also Published As

Publication number Publication date
NL6808359A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1968-12-16
DE1772636A1 (de) 1971-07-22
GB1198871A (en) 1970-07-15
US3569699A (en) 1971-03-09

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Legal Events

Date Code Title Description
ST Notification of lapse