FR1573874A - - Google Patents

Info

Publication number
FR1573874A
FR1573874A FR131999A FR1573874DA FR1573874A FR 1573874 A FR1573874 A FR 1573874A FR 131999 A FR131999 A FR 131999A FR 1573874D A FR1573874D A FR 1573874DA FR 1573874 A FR1573874 A FR 1573874A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR131999A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1573874A publication Critical patent/FR1573874A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
FR131999A 1967-12-13 1967-12-13 Expired FR1573874A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR131999 1967-12-13

Publications (1)

Publication Number Publication Date
FR1573874A true FR1573874A (fr) 1969-07-11

Family

ID=8643133

Family Applications (1)

Application Number Title Priority Date Filing Date
FR131999A Expired FR1573874A (fr) 1967-12-13 1967-12-13

Country Status (5)

Country Link
US (1) US3584960A (fr)
BE (1) BE724722A (fr)
DE (2) DE1814201A1 (fr)
FR (1) FR1573874A (fr)
GB (1) GB1254438A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5280437A (en) * 1991-06-28 1994-01-18 Digital Equipment Corporation Structure and method for direct calibration of registration measurement systems to actual semiconductor wafer process topography
TWI239933B (en) * 2004-03-16 2005-09-21 Powerchip Semiconductor Corp Positioning apparatus and positioning method using the same
JP4652883B2 (ja) * 2005-04-28 2011-03-16 日本発條株式会社 測定装置及び測定方法
DE102013210203A1 (de) * 2013-05-31 2014-12-04 Christof Ellerbrock Adapter zur Ausbildung einer Rohlingsanordnung sowie Rohlingsanordnung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2780956A (en) * 1955-01-28 1957-02-12 Jones And Lamson Machine Compa Circle tolerance gauge for optical comparators
US3025749A (en) * 1959-01-15 1962-03-20 Libbey Owens Ford Glass Co Inspection device for glass sheets

Also Published As

Publication number Publication date
DE6811042U (de) 1973-12-13
BE724722A (fr) 1969-05-02
US3584960A (en) 1971-06-15
DE1814201A1 (de) 1969-07-24
GB1254438A (en) 1971-11-24

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Legal Events

Date Code Title Description
ST Notification of lapse