FR1571147A - - Google Patents

Info

Publication number
FR1571147A
FR1571147A FR1571147DA FR1571147A FR 1571147 A FR1571147 A FR 1571147A FR 1571147D A FR1571147D A FR 1571147DA FR 1571147 A FR1571147 A FR 1571147A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1571147A publication Critical patent/FR1571147A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
FR1571147D 1968-06-27 1968-06-27 Expired FR1571147A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR156846 1968-06-27

Publications (1)

Publication Number Publication Date
FR1571147A true FR1571147A (fr) 1969-06-13

Family

ID=8651731

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1571147D Expired FR1571147A (fr) 1968-06-27 1968-06-27

Country Status (1)

Country Link
FR (1) FR1571147A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2437030A1 (fr) * 1978-09-21 1980-04-18 Cit Alcatel Dispositif de positionnement d'une piece sous un appareil de visee
FR2478937A1 (fr) * 1980-03-21 1981-09-25 Cit Alcatel Dispositif de mise en place de plaquettes portant des circuits electroniques sous un appareil de traitement ou de controle
EP0129731A1 (fr) * 1983-06-15 1985-01-02 The Perkin-Elmer Corporation Installation pour la manipulation de plaquettes semi-conductrices

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2437030A1 (fr) * 1978-09-21 1980-04-18 Cit Alcatel Dispositif de positionnement d'une piece sous un appareil de visee
FR2478937A1 (fr) * 1980-03-21 1981-09-25 Cit Alcatel Dispositif de mise en place de plaquettes portant des circuits electroniques sous un appareil de traitement ou de controle
EP0129731A1 (fr) * 1983-06-15 1985-01-02 The Perkin-Elmer Corporation Installation pour la manipulation de plaquettes semi-conductrices

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Legal Events

Date Code Title Description
ST Notification of lapse