FR1569170A - - Google Patents

Info

Publication number
FR1569170A
FR1569170A FR1569170DA FR1569170A FR 1569170 A FR1569170 A FR 1569170A FR 1569170D A FR1569170D A FR 1569170DA FR 1569170 A FR1569170 A FR 1569170A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1569170A publication Critical patent/FR1569170A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03D—APPARATUS FOR PROCESSING EXPOSED PHOTOGRAPHIC MATERIALS; ACCESSORIES THEREFOR
    • G03D7/00—Gas processing apparatus
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0041—Photosensitive materials providing an etching agent upon exposure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)
  • Drying Of Semiconductors (AREA)
FR1569170D 1967-05-29 1968-05-29 Expired FR1569170A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US64190167A 1967-05-29 1967-05-29

Publications (1)

Publication Number Publication Date
FR1569170A true FR1569170A (fr) 1969-05-30

Family

ID=24574325

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1569170D Expired FR1569170A (fr) 1967-05-29 1968-05-29

Country Status (4)

Country Link
US (1) US3494768A (fr)
DE (1) DE1767579A1 (fr)
FR (1) FR1569170A (fr)
GB (1) GB1220363A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2456145A1 (fr) * 1979-05-07 1980-12-05 Perkin Elmer Corp Procede et appareil pour traiter chimiquement des pieces par une phase gazeuse produite par une dissociation au moyen d'un laser
EP0068707A1 (fr) * 1981-06-25 1983-01-05 Corning Glass Works Méthode d'obtention de motifs optiques dans le verre

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3992208A (en) * 1973-03-12 1976-11-16 Fuji Photo Film Co., Ltd. Photo-sensitive etchant and method for forming metal image using same
GB1539700A (en) * 1976-05-14 1979-01-31 Int Plasma Corp Process for etching sio2
US4226666A (en) * 1978-08-21 1980-10-07 International Business Machines Corporation Etching method employing radiation and noble gas halide
US4207138A (en) * 1979-01-17 1980-06-10 Rca Corporation Mercury vapor leaching from microelectronic substrates
US4451327A (en) * 1982-12-17 1984-05-29 Psi Star, Inc. Process and structure for etching copper
US5030319A (en) * 1988-12-27 1991-07-09 Kabushiki Kaisha Toshiba Method of oxide etching with condensed plasma reaction product

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2804388A (en) * 1952-11-28 1957-08-27 Dick Co Ab Lithographic plate and method of manufacturing same
US2875046A (en) * 1954-03-01 1959-02-24 Dick Co Ab Positive working photolithographic plate and method for manufacturing same
US2841477A (en) * 1957-03-04 1958-07-01 Pacific Semiconductors Inc Photochemically activated gaseous etching method
US3122463A (en) * 1961-03-07 1964-02-25 Bell Telephone Labor Inc Etching technique for fabricating semiconductor or ceramic devices
US3095341A (en) * 1961-06-30 1963-06-25 Bell Telephone Labor Inc Photosensitive gas phase etching of semiconductors by selective radiation
NL275192A (fr) * 1961-06-30
US3271180A (en) * 1962-06-19 1966-09-06 Ibm Photolytic processes for fabricating thin film patterns
US3346384A (en) * 1963-04-25 1967-10-10 Gen Electric Metal image formation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2456145A1 (fr) * 1979-05-07 1980-12-05 Perkin Elmer Corp Procede et appareil pour traiter chimiquement des pieces par une phase gazeuse produite par une dissociation au moyen d'un laser
EP0068707A1 (fr) * 1981-06-25 1983-01-05 Corning Glass Works Méthode d'obtention de motifs optiques dans le verre

Also Published As

Publication number Publication date
DE1767579A1 (de) 1971-09-09
GB1220363A (en) 1971-01-27
US3494768A (en) 1970-02-10

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Legal Events

Date Code Title Description
ST Notification of lapse