FR1565789A - - Google Patents

Info

Publication number
FR1565789A
FR1565789A FR1565789DA FR1565789A FR 1565789 A FR1565789 A FR 1565789A FR 1565789D A FR1565789D A FR 1565789DA FR 1565789 A FR1565789 A FR 1565789A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1565789A publication Critical patent/FR1565789A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR1565789D 1967-04-12 1968-04-12 Expired FR1565789A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1688767 1967-04-12

Publications (1)

Publication Number Publication Date
FR1565789A true FR1565789A (en) 1969-05-02

Family

ID=10085479

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1565789D Expired FR1565789A (en) 1967-04-12 1968-04-12

Country Status (1)

Country Link
FR (1) FR1565789A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0094545A1 (en) * 1982-05-17 1983-11-23 International Business Machines Corporation Deposition rate monitoring method and apparatus
JP2023533901A (en) * 2020-08-25 2023-08-07 コーニング インコーポレイテッド In-situ observation of deposition thickness

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0094545A1 (en) * 1982-05-17 1983-11-23 International Business Machines Corporation Deposition rate monitoring method and apparatus
US4556845A (en) * 1982-05-17 1985-12-03 International Business Machines Corporation Method for monitoring deposition rate using an eddy current detector
JP2023533901A (en) * 2020-08-25 2023-08-07 コーニング インコーポレイテッド In-situ observation of deposition thickness

Similar Documents

Publication Publication Date Title
AU425114B2 (en)
AT298283B (en)
FR1565789A (en)
AU416737B2 (en)
AU2277767A (en)
AU342066A (en)
AU3189468A (en)
AU2256867A (en)
AU2116667A (en)
AU1273466A (en)
BE702226A (en)
BE692779A (en)
BE709684A (en)
BE709179A (en)
BE709721A (en)
BE710371A (en)
BE707632A (en)
AU459699A (en)
BE711084A (en)
BE707155A (en)
BE707116A (en)
BE702787A (en)
BE692654A (en)
BE695727A (en)
AU408412B2 (en)

Legal Events

Date Code Title Description
ST Notification of lapse