FR1564488A - - Google Patents

Info

Publication number
FR1564488A
FR1564488A FR1564488DA FR1564488A FR 1564488 A FR1564488 A FR 1564488A FR 1564488D A FR1564488D A FR 1564488DA FR 1564488 A FR1564488 A FR 1564488A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1564488A publication Critical patent/FR1564488A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
FR1564488D 1966-09-16 1967-08-02 Expired FR1564488A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US57996366A 1966-09-16 1966-09-16

Publications (1)

Publication Number Publication Date
FR1564488A true FR1564488A (fr) 1969-04-25

Family

ID=24319073

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1564488D Expired FR1564488A (fr) 1966-09-16 1967-08-02

Country Status (4)

Country Link
US (1) US3516850A (fr)
DE (1) DE1621362A1 (fr)
FR (1) FR1564488A (fr)
GB (1) GB1197757A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2205583A1 (fr) * 1972-11-07 1974-05-31 Commissariat Energie Atomique
EP0075902A2 (fr) * 1981-09-29 1983-04-06 Westinghouse Electric Corporation Procédé de dépôt à partir de la phase vapeur

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3658577A (en) * 1969-10-01 1972-04-25 Gene F Wakefield Vapor phase deposition of silicide refractory coatings
US3787233A (en) * 1969-10-14 1974-01-22 Ncr METHOD OF GROWING MOBILE POSITIVE ION FREE SiO{11 {11 FILMS
BE757500A (fr) * 1969-10-14 1971-03-16 Ncr Co Four tubulaire destine au traitement de dispositifs semi-conducteurs

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2887407A (en) * 1957-08-05 1959-05-19 Manufacturers Chemical Corp Preparation of diffusion coatings on metals
US3072498A (en) * 1961-02-28 1963-01-08 Texaco Inc Method of tin plating copper
US3147154A (en) * 1961-05-25 1964-09-01 Texaco Inc Method of depositing metal-containing material onto an extended surface
US3351487A (en) * 1963-11-06 1967-11-07 Dow Chemical Co Process for plating permeable membrane
US3373018A (en) * 1965-02-17 1968-03-12 Allied Chem Production of rigid shapes of refractory metals by decomposition of the metal hexafluoride in the interstices of a green compact

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2205583A1 (fr) * 1972-11-07 1974-05-31 Commissariat Energie Atomique
EP0075902A2 (fr) * 1981-09-29 1983-04-06 Westinghouse Electric Corporation Procédé de dépôt à partir de la phase vapeur
EP0075902A3 (fr) * 1981-09-29 1984-07-25 Westinghouse Electric Corporation Procédé de dépôt à partir de la phase vapeur

Also Published As

Publication number Publication date
DE1621362A1 (de) 1971-05-13
GB1197757A (en) 1970-07-08
US3516850A (en) 1970-06-23

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Legal Events

Date Code Title Description
ST Notification of lapse