FR1564151A - - Google Patents

Info

Publication number
FR1564151A
FR1564151A FR1564151DA FR1564151A FR 1564151 A FR1564151 A FR 1564151A FR 1564151D A FR1564151D A FR 1564151DA FR 1564151 A FR1564151 A FR 1564151A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1564151A publication Critical patent/FR1564151A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR1564151D 1967-04-05 1968-04-05 Expired FR1564151A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US628590A US3416722A (en) 1967-04-05 1967-04-05 High vacuum pump employing apertured penning cells driving ion beams into a target covered by a getter sublimator

Publications (1)

Publication Number Publication Date
FR1564151A true FR1564151A (de) 1969-04-18

Family

ID=24519526

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1564151D Expired FR1564151A (de) 1967-04-05 1968-04-05

Country Status (5)

Country Link
US (1) US3416722A (de)
CH (1) CH475650A (de)
DE (1) DE1764062A1 (de)
FR (1) FR1564151A (de)
GB (1) GB1182725A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100611826B1 (ko) * 1998-06-29 2006-08-11 동경 엘렉트론 주식회사 플라즈마 펌핑 셀 및 이온 펌핑 방법
US6835048B2 (en) * 2002-12-18 2004-12-28 Varian, Inc. Ion pump having secondary magnetic field
US20130195679A1 (en) * 2010-04-02 2013-08-01 National Institute Of Information And Communicatio Ion pump system
US10262845B2 (en) * 2015-02-10 2019-04-16 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10665437B2 (en) 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3018944A (en) * 1958-06-16 1962-01-30 Varian Associates Electrical vacuum pump apparatus
US3212442A (en) * 1962-04-23 1965-10-19 Litton Systems Inc Ion drag pumps

Also Published As

Publication number Publication date
CH475650A (de) 1969-07-15
US3416722A (en) 1968-12-17
GB1182725A (en) 1970-03-04
DE1764062A1 (de) 1971-04-29

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Legal Events

Date Code Title Description
ST Notification of lapse