FR1563945A - - Google Patents

Info

Publication number
FR1563945A
FR1563945A FR1563945DA FR1563945A FR 1563945 A FR1563945 A FR 1563945A FR 1563945D A FR1563945D A FR 1563945DA FR 1563945 A FR1563945 A FR 1563945A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1563945A publication Critical patent/FR1563945A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR1563945D 1968-03-01 1968-03-01 Expired FR1563945A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR142142 1968-03-01

Publications (1)

Publication Number Publication Date
FR1563945A true FR1563945A (nl) 1969-04-18

Family

ID=8646883

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1563945D Expired FR1563945A (nl) 1968-03-01 1968-03-01

Country Status (1)

Country Link
FR (1) FR1563945A (nl)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396807A1 (fr) * 1977-07-08 1979-02-02 Balzers Hochvakuum Installation de depot par evaporation sous vide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396807A1 (fr) * 1977-07-08 1979-02-02 Balzers Hochvakuum Installation de depot par evaporation sous vide

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Legal Events

Date Code Title Description
ST Notification of lapse