FR1555010A - - Google Patents

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Publication number
FR1555010A
FR1555010A FR1555010DA FR1555010A FR 1555010 A FR1555010 A FR 1555010A FR 1555010D A FR1555010D A FR 1555010DA FR 1555010 A FR1555010 A FR 1555010A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1555010A publication Critical patent/FR1555010A/fr
Expired legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
FR1555010D 1967-02-23 1968-02-02 Expired FR1555010A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH286867 1967-02-23

Publications (1)

Publication Number Publication Date
FR1555010A true FR1555010A (en) 1969-01-24

Family

ID=4243376

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1555010D Expired FR1555010A (en) 1967-02-23 1968-02-02

Country Status (2)

Country Link
FR (1) FR1555010A (en)
NL (1) NL6706895A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2354392A2 (en) * 1976-06-08 1978-01-06 Balzers Patent Beteilig Ag INSTALLATION FOR VACUUM TREATMENT OF A PRODUCT, ESPECIALLY FOR VACUUM EVAPORATION
EP0476676A2 (en) * 1990-09-21 1992-03-25 Anelva Corporation Thin film deposition method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2354392A2 (en) * 1976-06-08 1978-01-06 Balzers Patent Beteilig Ag INSTALLATION FOR VACUUM TREATMENT OF A PRODUCT, ESPECIALLY FOR VACUUM EVAPORATION
EP0476676A2 (en) * 1990-09-21 1992-03-25 Anelva Corporation Thin film deposition method
EP0476676A3 (en) * 1990-09-21 1992-04-15 Anelva Corporation Thin film deposition method
US5234862A (en) * 1990-09-21 1993-08-10 Anelva Corp. Thin film deposition method

Also Published As

Publication number Publication date
NL6706895A (en) 1968-08-26

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