FR1545356A - Procédé pour fabriquer des groupes de composants à couches minces pour l'électronique - Google Patents

Procédé pour fabriquer des groupes de composants à couches minces pour l'électronique

Info

Publication number
FR1545356A
FR1545356A FR129759A FR129759A FR1545356A FR 1545356 A FR1545356 A FR 1545356A FR 129759 A FR129759 A FR 129759A FR 129759 A FR129759 A FR 129759A FR 1545356 A FR1545356 A FR 1545356A
Authority
FR
France
Prior art keywords
electronics
thin film
film components
manufacturing groups
groups
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR129759A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to FR129759A priority Critical patent/FR1545356A/fr
Application granted granted Critical
Publication of FR1545356A publication Critical patent/FR1545356A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
FR129759A 1966-11-28 1967-11-27 Procédé pour fabriquer des groupes de composants à couches minces pour l'électronique Expired FR1545356A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR129759A FR1545356A (fr) 1966-11-28 1967-11-27 Procédé pour fabriquer des groupes de composants à couches minces pour l'électronique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES0107146 1966-11-28
FR129759A FR1545356A (fr) 1966-11-28 1967-11-27 Procédé pour fabriquer des groupes de composants à couches minces pour l'électronique

Publications (1)

Publication Number Publication Date
FR1545356A true FR1545356A (fr) 1968-11-08

Family

ID=25998683

Family Applications (1)

Application Number Title Priority Date Filing Date
FR129759A Expired FR1545356A (fr) 1966-11-28 1967-11-27 Procédé pour fabriquer des groupes de composants à couches minces pour l'électronique

Country Status (1)

Country Link
FR (1) FR1545356A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4107018A (en) * 1977-09-01 1978-08-15 Bendix Autolite Corporation Solid electrolyte gas sensor having a protective bonding layer
FR2487995A1 (fr) * 1980-07-29 1982-02-05 Lignes Telegraph Telephon Procede de fabrication d'une plaquette utilisable pour le marquage de composants et plaquette de marquage
FR2490553A1 (fr) * 1980-09-22 1982-03-26 Gen Electric Procede de fabrication d'un stratifie revetu de cuivre et stratifie obtenu
EP0538468A1 (fr) * 1987-12-18 1993-04-28 MITSUI MINING & SMELTING CO., LTD. Circuit conducteur a film mince et procede de production

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4107018A (en) * 1977-09-01 1978-08-15 Bendix Autolite Corporation Solid electrolyte gas sensor having a protective bonding layer
FR2487995A1 (fr) * 1980-07-29 1982-02-05 Lignes Telegraph Telephon Procede de fabrication d'une plaquette utilisable pour le marquage de composants et plaquette de marquage
FR2490553A1 (fr) * 1980-09-22 1982-03-26 Gen Electric Procede de fabrication d'un stratifie revetu de cuivre et stratifie obtenu
EP0538468A1 (fr) * 1987-12-18 1993-04-28 MITSUI MINING & SMELTING CO., LTD. Circuit conducteur a film mince et procede de production
EP0538468A4 (en) * 1987-12-18 1993-06-09 Mitsui Mining & Smelting Co., Ltd. Thin-film conductive circuit and process for its production

Similar Documents

Publication Publication Date Title
FR92624E (fr) Procédé de préparation d'acides alpha-aminocarboxyliques
FR1545356A (fr) Procédé pour fabriquer des groupes de composants à couches minces pour l'électronique
CH451339A (fr) Procédé pour l'activation de pellicules minces semi-conductrices
FR1545977A (fr) Procédé pour produire des doses unitaires de médicaments à l'état solide
FR1516407A (fr) Procédé de fabrication d'un groupe de composants à couches minces pour l'électronique
FR1461060A (fr) Procédé pour la fabrication de films minces
FR1547627A (fr) Procédé de préparation d'esters n-carbamoyloxyphényl-carbamiques
FR1545270A (fr) Procédé de préparation d'acides phénylalcanoïques
FR1518386A (fr) Procédé de préparation d'aza-dioxa-bicyclo-alcanes
FR1511342A (fr) Procédé pour la préparation d'alpha-nitro-cétones
FR1538880A (fr) Procédé de fabrication de pellicules minces et uniformes de matières hygroscopiques
FR1484525A (fr) Groupe de composants à couches minces pour l'électronique
FR1547223A (fr) Procédé de préparation d'esters phényliques
CH469009A (fr) Procédé pour la préparation de nouveaux amino-alcools
FR1474441A (fr) Procédé de préparation d'acides alpha-aminocarboxyliques
FR1503158A (fr) Procédé pour la préparation d'acides alpha-aminocarboxyliques
FR1511207A (fr) Procédé pour la préparation de 10 alpha-stéroïdes
FR1540725A (fr) Procédé pour la préparation d'acides indolyl-3-acétiques
FR1539229A (fr) Procédé pour la production d'oxyde nitreux
FR1546169A (fr) Procédé de préparation de polyuréthanes linéaires
FR1535809A (fr) Procédé de synthèse d'isothiazoles
FR1473246A (fr) Procédé de préparation d'acides aminocyclohexanecarboxyliques
FR1470160A (fr) Procédé de préparation d'acides 2-méthyl-4-chlorophénoxycarboxyliques
FR1545320A (fr) Procédé pour la production de couches ferromagnétiques minces
CH464941A (fr) Procédé de synthèse de trifluorométhylbenzimidazoles et de trifluorométhylimidazopyridines