FR1543781A - Dispositif de gravure à effet constant - Google Patents

Dispositif de gravure à effet constant

Info

Publication number
FR1543781A
FR1543781A FR1543781DA FR1543781A FR 1543781 A FR1543781 A FR 1543781A FR 1543781D A FR1543781D A FR 1543781DA FR 1543781 A FR1543781 A FR 1543781A
Authority
FR
France
Prior art keywords
engraving device
constant effect
effect engraving
constant
engraving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of FR1543781A publication Critical patent/FR1543781A/fr
Active legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/46Regeneration of etching compositions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D9/00Crystallisation
    • B01D9/0004Crystallisation cooling by heat exchange
    • B01D9/0013Crystallisation cooling by heat exchange by indirect heat exchange
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D9/00Crystallisation
    • B01D9/0036Crystallisation on to a bed of product crystals; Seeding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D9/00Crystallisation
    • B01D9/0059General arrangements of crystallisation plant, e.g. flow sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D9/00Crystallisation
    • B01D9/0063Control or regulation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F21/00Dissolving
    • B01F21/20Dissolving using flow mixing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F21/00Dissolving
    • B01F21/30Workflow diagrams or layout of plants, e.g. flow charts; Details of workflow diagrams or layout of plants, e.g. controlling means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
FR1543781D 1966-12-27 Dispositif de gravure à effet constant Active FR1543781A (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US60494066A 1966-12-27 1966-12-27
US87089969A 1969-10-08 1969-10-08
US87090069A 1969-10-08 1969-10-08

Publications (1)

Publication Number Publication Date
FR1543781A true FR1543781A (fr)

Family

ID=27416910

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1543781D Active FR1543781A (fr) 1966-12-27 Dispositif de gravure à effet constant

Country Status (5)

Country Link
US (3) US3505135A (fr)
DE (1) DE1621476A1 (fr)
FR (1) FR1543781A (fr)
GB (1) GB1194748A (fr)
NL (1) NL6716776A (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3933544A (en) * 1971-03-08 1976-01-20 Firma Hans Hollmuller, Maschinenbau Method of etching copper and copper alloys
US4058431A (en) * 1971-03-08 1977-11-15 Firma Hans Hollmuller, Maschinenbau Method of etching copper and copper alloys
US4060097A (en) * 1975-09-17 1977-11-29 Oxford Keith E Automatic etching system
US4132585A (en) * 1975-09-17 1979-01-02 Oxford Keith E Method of automatically monitoring and regenerating an etchant
US4042444A (en) * 1976-04-26 1977-08-16 General Dynamics Etchant rejuvenation control system
US4159194A (en) * 1977-09-28 1979-06-26 Dart Industries Inc. Crystallization apparatus and process
DE3342016C2 (de) * 1983-11-22 1986-11-13 VLT Gesellschaft für verfahrenstechnische Entwicklung mbH, 7000 Stuttgart Vorrichtung zum Mischen und Absetzen von partikelhaltigen Flüssigkeiten
US4830836A (en) * 1984-03-30 1989-05-16 Kawasaki Steel Corporation Metal stripping system and an operation process therefor
DE3569201D1 (en) * 1984-03-30 1989-05-11 Kawasaki Steel Co Crystallization apparatus for metal stripping
US6419754B1 (en) * 1999-08-18 2002-07-16 Chartered Semiconductor Manufacturting Ltd. Endpoint detection and novel chemicals in copper stripping
ES2568243T3 (es) * 2007-12-21 2016-04-28 Condias Gmbh Electrodo de diamante y procedimiento para fabricarlo
US11229856B2 (en) * 2017-09-29 2022-01-25 Taiwan Semiconductor Manufacturing Co., Ltd. Etching solution recycling system and method for wafer etching apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2130065A (en) * 1930-03-07 1938-09-13 American Potash & Chem Corp Crystallization method
BE466111A (fr) * 1946-06-21
US2602023A (en) * 1949-11-10 1952-07-01 Phillips Petroleum Co Crystal manufacture
US2769735A (en) * 1954-09-29 1956-11-06 Cleveland Ind Res Inc Method of pickling iron and recovering pickling agent
US3155697A (en) * 1957-06-24 1964-11-03 Hoechst Ag Continuous countercurrent process for the transition of substances between a liquid and a solid phase
US3216873A (en) * 1961-08-04 1965-11-09 Fmc Corp Method of etching photoengraving plates and etching solution used therefor
US3401068A (en) * 1965-02-15 1968-09-10 Chemcut Corp Method and apparatus for uniformly etching printed circuits by control of the conveyor speed
US3459509A (en) * 1966-05-09 1969-08-05 Daido Namarikakoki Co Ltd Continuous crystallization apparatus for even grains

Also Published As

Publication number Publication date
US3615246A (en) 1971-10-26
NL6716776A (fr) 1968-06-28
US3592715A (en) 1971-07-13
US3505135A (en) 1970-04-07
GB1194748A (en) 1970-06-10
DE1621476A1 (de) 1971-05-06

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