FR1525536A - Controlling the Contamination Impurity Concentration in a Carrier Gas Stream - Google Patents

Controlling the Contamination Impurity Concentration in a Carrier Gas Stream

Info

Publication number
FR1525536A
FR1525536A FR108781A FR108781A FR1525536A FR 1525536 A FR1525536 A FR 1525536A FR 108781 A FR108781 A FR 108781A FR 108781 A FR108781 A FR 108781A FR 1525536 A FR1525536 A FR 1525536A
Authority
FR
France
Prior art keywords
controlling
gas stream
carrier gas
impurity concentration
contamination impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR108781A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Priority to FR108781A priority Critical patent/FR1525536A/en
Application granted granted Critical
Publication of FR1525536A publication Critical patent/FR1525536A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
FR108781A 1966-06-02 1967-06-01 Controlling the Contamination Impurity Concentration in a Carrier Gas Stream Expired FR1525536A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR108781A FR1525536A (en) 1966-06-02 1967-06-01 Controlling the Contamination Impurity Concentration in a Carrier Gas Stream

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US55488866A 1966-06-02 1966-06-02
FR108781A FR1525536A (en) 1966-06-02 1967-06-01 Controlling the Contamination Impurity Concentration in a Carrier Gas Stream

Publications (1)

Publication Number Publication Date
FR1525536A true FR1525536A (en) 1968-05-17

Family

ID=26176981

Family Applications (1)

Application Number Title Priority Date Filing Date
FR108781A Expired FR1525536A (en) 1966-06-02 1967-06-01 Controlling the Contamination Impurity Concentration in a Carrier Gas Stream

Country Status (1)

Country Link
FR (1) FR1525536A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0068388A1 (en) * 1981-06-22 1983-01-05 CSELT Centro Studi e Laboratori Telecomunicazioni S.p.A. Process and device for online dehydrogenation of fibre-drawing preforms

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0068388A1 (en) * 1981-06-22 1983-01-05 CSELT Centro Studi e Laboratori Telecomunicazioni S.p.A. Process and device for online dehydrogenation of fibre-drawing preforms

Similar Documents

Publication Publication Date Title
CH478581A (en) Air filter device
DD71251A5 (en) Quick-release fastener
CH460601A (en) Device for guiding and forwarding sliver
FR1522194A (en) Support device for frames, decorative elements and sub-ceilings
FR1522506A (en) Label set
FR1512280A (en) Zipper with tightened support bands on closure elements
FR1525536A (en) Controlling the Contamination Impurity Concentration in a Carrier Gas Stream
FR1461790A (en) Advanced multi-speed drive axle system
CH453752A (en) Oxygen detector
IL30223A0 (en) Lipid-normalizing 4'-phenoxyalkanesulfonanilides
FR1523191A (en) Improvements to the processes and devices for installing prefabricated elements
CH481338A (en) Attachment support for at least one tube
FR1446308A (en) Sealing device
MTP579B (en) Cis-propenyl compounds) and processes
FR1506118A (en) Narcosis device with parallel bypass on the evaporator
CH503926A (en) Sealing device
FR1358238A (en) Particle multiplier equipped with a switching device
FR1517626A (en) Air purge valve
CA774730A (en) Gas stream monitor
FR1437656A (en) Improvements to light display processes
FR1497992A (en) Device equipped with a diode operating in the region where the current originates and a diode intended for such a device
FR1408465A (en) Improvements in aircraft controls
FR1432832A (en) Horizontal turn in the air
FR1534710A (en) Sealing device
FR1526126A (en) Regulator based on the operational amplifier principle