FR1518363A - Long-life refractory cathodes - Google Patents

Long-life refractory cathodes

Info

Publication number
FR1518363A
FR1518363A FR8446A FR06008446A FR1518363A FR 1518363 A FR1518363 A FR 1518363A FR 8446 A FR8446 A FR 8446A FR 06008446 A FR06008446 A FR 06008446A FR 1518363 A FR1518363 A FR 1518363A
Authority
FR
France
Prior art keywords
cathodes
long
refractory
life
life refractory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8446A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR1518363A publication Critical patent/FR1518363A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
FR8446A 1966-05-23 1967-04-04 Long-life refractory cathodes Expired FR1518363A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US55219066A 1966-05-23 1966-05-23

Publications (1)

Publication Number Publication Date
FR1518363A true FR1518363A (en) 1968-03-22

Family

ID=24204300

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8446A Expired FR1518363A (en) 1966-05-23 1967-04-04 Long-life refractory cathodes

Country Status (3)

Country Link
DE (1) DE1589941A1 (en)
FR (1) FR1518363A (en)
GB (1) GB1132554A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3029853C2 (en) * 1980-08-07 1982-08-26 Standard Elektrik Lorenz Ag, 7000 Stuttgart Wehnelt cathode indirectly heated by electron impact

Also Published As

Publication number Publication date
GB1132554A (en) 1968-11-06
DE1589941A1 (en) 1970-04-16

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