FR1514419A - Method and device for electrolytic pickling of thin semiconductor bodies - Google Patents

Method and device for electrolytic pickling of thin semiconductor bodies

Info

Publication number
FR1514419A
FR1514419A FR92172A FR92172A FR1514419A FR 1514419 A FR1514419 A FR 1514419A FR 92172 A FR92172 A FR 92172A FR 92172 A FR92172 A FR 92172A FR 1514419 A FR1514419 A FR 1514419A
Authority
FR
France
Prior art keywords
thin semiconductor
semiconductor bodies
electrolytic pickling
pickling
electrolytic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR92172A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of FR1514419A publication Critical patent/FR1514419A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/02Etching
    • C25F3/12Etching of semiconducting materials
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3063Electrolytic etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
FR92172A 1966-01-25 1967-01-23 Method and device for electrolytic pickling of thin semiconductor bodies Expired FR1514419A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0101607 1966-01-25

Publications (1)

Publication Number Publication Date
FR1514419A true FR1514419A (en) 1968-02-23

Family

ID=7523869

Family Applications (1)

Application Number Title Priority Date Filing Date
FR92172A Expired FR1514419A (en) 1966-01-25 1967-01-23 Method and device for electrolytic pickling of thin semiconductor bodies

Country Status (3)

Country Link
BE (1) BE693170A (en)
FR (1) FR1514419A (en)
NL (1) NL6700945A (en)

Also Published As

Publication number Publication date
BE693170A (en) 1967-07-25
NL6700945A (en) 1967-07-26

Similar Documents

Publication Publication Date Title
BE756091A (en) METHOD AND DEVICE FOR THE TREATMENT OF METAL
FR1515393A (en) Composition and method of surface treatment
IT954023B (en) METHOD AND APPARATUS OF HYDROLYSIS
BE732583A (en) Method and device for the electrolytic treatment of surfaces
BE776721A (en) METHOD AND DEVICE FOR THE MANUFACTURING OF BODIES OF WAFERS IN CASES (WAFFLETS-CASES)
IL31953A0 (en) Method for the concentration of solutions and an apparatus for the performance of said method
FR1514419A (en) Method and device for electrolytic pickling of thin semiconductor bodies
FR1441481A (en) Method and device for rolling bearings of sliding bearings
CH498052A (en) Method and device thickening of sludge
CA936454A (en) Etching bath for aluminium and method of etching aluminium therewith
FR1481593A (en) Method and device for the treatment of metal surfaces by electrolytic pickling
FR1470962A (en) Method and device for the preparation of mortar
BE757691R (en) METHOD AND DEVICE FOR THE CLEANING AND DEGREASING OF STRIP
FR1340928A (en) Method and device for drawing straight lines
FR1344700A (en) Method and device for the examination of semiconductor bodies
FR1539703A (en) Vacuum coating method and device
BE760998A (en) METHOD AND DEVICE FOR THE MANUFACTURING OF BODIES
FR1371208A (en) Method and composition for cleaning metal surfaces
FR1369635A (en) Method and solution for coating metal surfaces
FR1353964A (en) Method and device for deep drawing forming of sandwich structures
FR1488750A (en) Device for annealing and treating the internal surface of hollow metal bodies
FR1488483A (en) Method and device for the manufacture of continuous panels from chipboard
FR1481070A (en) Method and device for the decomposition of amalgams
FR1484997A (en) Method and device for the treatment of spun metal articles
AU422825B2 (en) Apparatus and method forthe treatment of liquid