FR1508463A - Décapage par pulvérisation à haute fréquence - Google Patents

Décapage par pulvérisation à haute fréquence

Info

Publication number
FR1508463A
FR1508463A FR06008272A FR06008272A FR1508463A FR 1508463 A FR1508463 A FR 1508463A FR 06008272 A FR06008272 A FR 06008272A FR 06008272 A FR06008272 A FR 06008272A FR 1508463 A FR1508463 A FR 1508463A
Authority
FR
France
Prior art keywords
high frequency
frequency spray
spray stripping
stripping
spray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR06008272A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR1508463A publication Critical patent/FR1508463A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR06008272A 1966-01-12 1967-01-05 Décapage par pulvérisation à haute fréquence Expired FR1508463A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US52013166A 1966-01-12 1966-01-12

Publications (1)

Publication Number Publication Date
FR1508463A true FR1508463A (fr) 1968-01-05

Family

ID=1587120

Family Applications (1)

Application Number Title Priority Date Filing Date
FR06008272A Expired FR1508463A (fr) 1966-01-12 1967-01-05 Décapage par pulvérisation à haute fréquence

Country Status (1)

Country Link
FR (1) FR1508463A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2601288A1 (de) * 1975-01-22 1976-07-29 Tokyo Shibaura Electric Co Gasaetzvorrichtung, insbesondere zur herstellung von halbleitervorrichtungen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2601288A1 (de) * 1975-01-22 1976-07-29 Tokyo Shibaura Electric Co Gasaetzvorrichtung, insbesondere zur herstellung von halbleitervorrichtungen

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