FR1504637A - Thin film thickness measuring device - Google Patents

Thin film thickness measuring device

Info

Publication number
FR1504637A
FR1504637A FR79532A FR79532A FR1504637A FR 1504637 A FR1504637 A FR 1504637A FR 79532 A FR79532 A FR 79532A FR 79532 A FR79532 A FR 79532A FR 1504637 A FR1504637 A FR 1504637A
Authority
FR
France
Prior art keywords
thin film
measuring device
film thickness
thickness measuring
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR79532A
Other languages
French (fr)
Inventor
Francois Gans
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR79532A priority Critical patent/FR1504637A/en
Application granted granted Critical
Publication of FR1504637A publication Critical patent/FR1504637A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0683Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
FR79532A 1966-10-11 1966-10-11 Thin film thickness measuring device Expired FR1504637A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR79532A FR1504637A (en) 1966-10-11 1966-10-11 Thin film thickness measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR79532A FR1504637A (en) 1966-10-11 1966-10-11 Thin film thickness measuring device

Publications (1)

Publication Number Publication Date
FR1504637A true FR1504637A (en) 1967-12-08

Family

ID=8618855

Family Applications (1)

Application Number Title Priority Date Filing Date
FR79532A Expired FR1504637A (en) 1966-10-11 1966-10-11 Thin film thickness measuring device

Country Status (1)

Country Link
FR (1) FR1504637A (en)

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