FR1502215A - Method and apparatus for the controlled deposition of evaporated substances on the surfaces of objects - Google Patents

Method and apparatus for the controlled deposition of evaporated substances on the surfaces of objects

Info

Publication number
FR1502215A
FR1502215A FR84156A FR84156A FR1502215A FR 1502215 A FR1502215 A FR 1502215A FR 84156 A FR84156 A FR 84156A FR 84156 A FR84156 A FR 84156A FR 1502215 A FR1502215 A FR 1502215A
Authority
FR
France
Prior art keywords
objects
controlled deposition
evaporated substances
evaporated
substances
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR84156A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASCOT Srl
Original Assignee
ASCOT Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASCOT Srl filed Critical ASCOT Srl
Application granted granted Critical
Publication of FR1502215A publication Critical patent/FR1502215A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
FR84156A 1965-11-18 1966-11-18 Method and apparatus for the controlled deposition of evaporated substances on the surfaces of objects Expired FR1502215A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT2559065 1965-11-18

Publications (1)

Publication Number Publication Date
FR1502215A true FR1502215A (en) 1967-11-18

Family

ID=11217191

Family Applications (1)

Application Number Title Priority Date Filing Date
FR84156A Expired FR1502215A (en) 1965-11-18 1966-11-18 Method and apparatus for the controlled deposition of evaporated substances on the surfaces of objects

Country Status (1)

Country Link
FR (1) FR1502215A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2416439A1 (en) * 1978-01-31 1979-08-31 Blinov Viktor Electric furnace using glow discharge - for chemical treatment and hardening of workpieces, esp. nitriding and/or carburising

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2416439A1 (en) * 1978-01-31 1979-08-31 Blinov Viktor Electric furnace using glow discharge - for chemical treatment and hardening of workpieces, esp. nitriding and/or carburising

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