FR1497957A - Appareil effectuant, simultanément ou non, un décapage et un revêtement par l'action d'ions - Google Patents

Appareil effectuant, simultanément ou non, un décapage et un revêtement par l'action d'ions

Info

Publication number
FR1497957A
FR1497957A FR81853A FR81853A FR1497957A FR 1497957 A FR1497957 A FR 1497957A FR 81853 A FR81853 A FR 81853A FR 81853 A FR81853 A FR 81853A FR 1497957 A FR1497957 A FR 1497957A
Authority
FR
France
Prior art keywords
pickling
ions
coating
action
apparatus carrying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR81853A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Precision Inc
Original Assignee
General Precision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Precision Inc filed Critical General Precision Inc
Priority to FR81853A priority Critical patent/FR1497957A/fr
Application granted granted Critical
Publication of FR1497957A publication Critical patent/FR1497957A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/36—Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
FR81853A 1966-10-27 1966-10-27 Appareil effectuant, simultanément ou non, un décapage et un revêtement par l'action d'ions Expired FR1497957A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR81853A FR1497957A (fr) 1966-10-27 1966-10-27 Appareil effectuant, simultanément ou non, un décapage et un revêtement par l'action d'ions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR81853A FR1497957A (fr) 1966-10-27 1966-10-27 Appareil effectuant, simultanément ou non, un décapage et un revêtement par l'action d'ions

Publications (1)

Publication Number Publication Date
FR1497957A true FR1497957A (fr) 1967-10-13

Family

ID=8620079

Family Applications (1)

Application Number Title Priority Date Filing Date
FR81853A Expired FR1497957A (fr) 1966-10-27 1966-10-27 Appareil effectuant, simultanément ou non, un décapage et un revêtement par l'action d'ions

Country Status (1)

Country Link
FR (1) FR1497957A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2352393A1 (fr) * 1976-05-19 1977-12-16 Battelle Memorial Institute Procede pour effectuer un depot dans une decharge luminescente sur au moins un substrat, et un decapage ionique de ce substrat et dispositif pour la mise en oeuvre de ce procede
EP0141417A2 (fr) * 1983-11-07 1985-05-15 Hitachi, Ltd. Appareil pour l'obtention d'un film par faisceau d'ions

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2352393A1 (fr) * 1976-05-19 1977-12-16 Battelle Memorial Institute Procede pour effectuer un depot dans une decharge luminescente sur au moins un substrat, et un decapage ionique de ce substrat et dispositif pour la mise en oeuvre de ce procede
EP0141417A2 (fr) * 1983-11-07 1985-05-15 Hitachi, Ltd. Appareil pour l'obtention d'un film par faisceau d'ions
EP0141417A3 (en) * 1983-11-07 1987-03-25 Hitachi, Ltd. Method and apparatus for forming film by ion beam

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