FR1495326A - Electron beam cannon - Google Patents
Electron beam cannonInfo
- Publication number
- FR1495326A FR1495326A FR78267A FR78267A FR1495326A FR 1495326 A FR1495326 A FR 1495326A FR 78267 A FR78267 A FR 78267A FR 78267 A FR78267 A FR 78267A FR 1495326 A FR1495326 A FR 1495326A
- Authority
- FR
- France
- Prior art keywords
- electron beam
- beam cannon
- cannon
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR78267A FR1495326A (en) | 1965-10-05 | 1966-09-30 | Electron beam cannon |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US493154A US3388279A (en) | 1965-10-05 | 1965-10-05 | Electron-beam gun |
FR78267A FR1495326A (en) | 1965-10-05 | 1966-09-30 | Electron beam cannon |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1495326A true FR1495326A (en) | 1967-09-15 |
Family
ID=26173412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR78267A Expired FR1495326A (en) | 1965-10-05 | 1966-09-30 | Electron beam cannon |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1495326A (en) |
-
1966
- 1966-09-30 FR FR78267A patent/FR1495326A/en not_active Expired
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