FR1489630A - Process for the treatment of semiconductor materials and semiconductor devices obtained by the process - Google Patents

Process for the treatment of semiconductor materials and semiconductor devices obtained by the process

Info

Publication number
FR1489630A
FR1489630A FR73341A FR73341A FR1489630A FR 1489630 A FR1489630 A FR 1489630A FR 73341 A FR73341 A FR 73341A FR 73341 A FR73341 A FR 73341A FR 1489630 A FR1489630 A FR 1489630A
Authority
FR
France
Prior art keywords
treatment
semiconductor
devices obtained
semiconductor devices
semiconductor materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR73341A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Priority to FR73341A priority Critical patent/FR1489630A/en
Application granted granted Critical
Publication of FR1489630A publication Critical patent/FR1489630A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
FR73341A 1965-08-17 1966-08-17 Process for the treatment of semiconductor materials and semiconductor devices obtained by the process Expired FR1489630A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR73341A FR1489630A (en) 1965-08-17 1966-08-17 Process for the treatment of semiconductor materials and semiconductor devices obtained by the process

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US48045265A 1965-08-17 1965-08-17
FR73341A FR1489630A (en) 1965-08-17 1966-08-17 Process for the treatment of semiconductor materials and semiconductor devices obtained by the process

Publications (1)

Publication Number Publication Date
FR1489630A true FR1489630A (en) 1967-07-21

Family

ID=26172626

Family Applications (1)

Application Number Title Priority Date Filing Date
FR73341A Expired FR1489630A (en) 1965-08-17 1966-08-17 Process for the treatment of semiconductor materials and semiconductor devices obtained by the process

Country Status (1)

Country Link
FR (1) FR1489630A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991003834A1 (en) * 1989-09-05 1991-03-21 Mcnc Method for selectively depositing material on substrates

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991003834A1 (en) * 1989-09-05 1991-03-21 Mcnc Method for selectively depositing material on substrates

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