FR1487438A - Non-thermionic electron beam source - Google Patents

Non-thermionic electron beam source

Info

Publication number
FR1487438A
FR1487438A FR62895A FR62895A FR1487438A FR 1487438 A FR1487438 A FR 1487438A FR 62895 A FR62895 A FR 62895A FR 62895 A FR62895 A FR 62895A FR 1487438 A FR1487438 A FR 1487438A
Authority
FR
France
Prior art keywords
electron beam
beam source
thermionic electron
thermionic
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR62895A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US459650A external-priority patent/US3414702A/en
Application filed by General Electric Co filed Critical General Electric Co
Priority to FR62895A priority Critical patent/FR1487438A/en
Application granted granted Critical
Publication of FR1487438A publication Critical patent/FR1487438A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
FR62895A 1965-05-28 1966-05-25 Non-thermionic electron beam source Expired FR1487438A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR62895A FR1487438A (en) 1965-05-28 1966-05-25 Non-thermionic electron beam source

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US459650A US3414702A (en) 1965-05-28 1965-05-28 Nonthermionic electron beam apparatus
FR62895A FR1487438A (en) 1965-05-28 1966-05-25 Non-thermionic electron beam source

Publications (1)

Publication Number Publication Date
FR1487438A true FR1487438A (en) 1967-07-07

Family

ID=26170885

Family Applications (1)

Application Number Title Priority Date Filing Date
FR62895A Expired FR1487438A (en) 1965-05-28 1966-05-25 Non-thermionic electron beam source

Country Status (1)

Country Link
FR (1) FR1487438A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0002406A1 (en) * 1977-11-28 1979-06-13 ANVAR Agence Nationale de Valorisation de la Recherche Ion source, in particular for an ion implantation device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0002406A1 (en) * 1977-11-28 1979-06-13 ANVAR Agence Nationale de Valorisation de la Recherche Ion source, in particular for an ion implantation device

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