FR1477072A - Epitaxial semiconductor layer used as a diffusion mask - Google Patents

Epitaxial semiconductor layer used as a diffusion mask

Info

Publication number
FR1477072A
FR1477072A FR58561A FR58561A FR1477072A FR 1477072 A FR1477072 A FR 1477072A FR 58561 A FR58561 A FR 58561A FR 58561 A FR58561 A FR 58561A FR 1477072 A FR1477072 A FR 1477072A
Authority
FR
France
Prior art keywords
semiconductor layer
layer used
epitaxial semiconductor
diffusion mask
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR58561A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US451583A external-priority patent/US3406049A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to FR58561A priority Critical patent/FR1477072A/en
Application granted granted Critical
Publication of FR1477072A publication Critical patent/FR1477072A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/18—Controlling or regulating
    • C30B31/185—Pattern diffusion, e.g. by using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
FR58561A 1965-04-28 1966-04-22 Epitaxial semiconductor layer used as a diffusion mask Expired FR1477072A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR58561A FR1477072A (en) 1965-04-28 1966-04-22 Epitaxial semiconductor layer used as a diffusion mask

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US451583A US3406049A (en) 1965-04-28 1965-04-28 Epitaxial semiconductor layer as a diffusion mask
FR58561A FR1477072A (en) 1965-04-28 1966-04-22 Epitaxial semiconductor layer used as a diffusion mask

Publications (1)

Publication Number Publication Date
FR1477072A true FR1477072A (en) 1967-04-14

Family

ID=26170137

Family Applications (1)

Application Number Title Priority Date Filing Date
FR58561A Expired FR1477072A (en) 1965-04-28 1966-04-22 Epitaxial semiconductor layer used as a diffusion mask

Country Status (1)

Country Link
FR (1) FR1477072A (en)

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