FR1462335A - Procédé d'application de couches d'oxyde d'étain sur des dispositifs supports - Google Patents

Procédé d'application de couches d'oxyde d'étain sur des dispositifs supports

Info

Publication number
FR1462335A
FR1462335A FR35235A FR35235A FR1462335A FR 1462335 A FR1462335 A FR 1462335A FR 35235 A FR35235 A FR 35235A FR 35235 A FR35235 A FR 35235A FR 1462335 A FR1462335 A FR 1462335A
Authority
FR
France
Prior art keywords
tin oxide
oxide layers
support devices
applying tin
applying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR35235A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Priority to FR35235A priority Critical patent/FR1462335A/fr
Application granted granted Critical
Publication of FR1462335A publication Critical patent/FR1462335A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C03C17/2453—Coating containing SnO2
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Chemistry (AREA)
FR35235A 1965-10-16 1965-10-16 Procédé d'application de couches d'oxyde d'étain sur des dispositifs supports Expired FR1462335A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR35235A FR1462335A (fr) 1965-10-16 1965-10-16 Procédé d'application de couches d'oxyde d'étain sur des dispositifs supports

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR35235A FR1462335A (fr) 1965-10-16 1965-10-16 Procédé d'application de couches d'oxyde d'étain sur des dispositifs supports

Publications (1)

Publication Number Publication Date
FR1462335A true FR1462335A (fr) 1966-04-15

Family

ID=8590629

Family Applications (1)

Application Number Title Priority Date Filing Date
FR35235A Expired FR1462335A (fr) 1965-10-16 1965-10-16 Procédé d'application de couches d'oxyde d'étain sur des dispositifs supports

Country Status (1)

Country Link
FR (1) FR1462335A (fr)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984004334A1 (fr) * 1983-04-29 1984-11-08 Hughes Aircraft Co Chambre de reaction de deposition de vapeur chimique a ecoulement vertical positif inverse
FR2570085A1 (fr) * 1984-09-13 1986-03-14 Itaru Todoriki Dir Kogyo Gijut Dispositif de formation de fines pellicules sur des substrats
EP0192892A1 (fr) * 1985-02-25 1986-09-03 Ford Motor Company Limited Procédé de préparation d'une feuille de verre réfléchissant l'infrarouge
EP0232434A1 (fr) * 1985-12-13 1987-08-19 Corning Glass Works Méthode de dépôt de films d'oxydes métalliques minces transparents
US4732110A (en) * 1983-04-29 1988-03-22 Hughes Aircraft Company Inverted positive vertical flow chemical vapor deposition reactor chamber
US4993361A (en) * 1986-07-11 1991-02-19 Unvala Limited Chemical vapor deposition
WO2003029516A1 (fr) * 2001-09-29 2003-04-10 Cree, Inc. Appareil pour depot chimique en phase vapeur inverse
WO2004079043A2 (fr) * 2003-03-04 2004-09-16 Cree, Inc. Suscepteur pour reacteur mocvd inverse
US7122844B2 (en) 2002-05-13 2006-10-17 Cree, Inc. Susceptor for MOCVD reactor

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984004334A1 (fr) * 1983-04-29 1984-11-08 Hughes Aircraft Co Chambre de reaction de deposition de vapeur chimique a ecoulement vertical positif inverse
US4732110A (en) * 1983-04-29 1988-03-22 Hughes Aircraft Company Inverted positive vertical flow chemical vapor deposition reactor chamber
FR2570085A1 (fr) * 1984-09-13 1986-03-14 Itaru Todoriki Dir Kogyo Gijut Dispositif de formation de fines pellicules sur des substrats
EP0192892A1 (fr) * 1985-02-25 1986-09-03 Ford Motor Company Limited Procédé de préparation d'une feuille de verre réfléchissant l'infrarouge
EP0232434A1 (fr) * 1985-12-13 1987-08-19 Corning Glass Works Méthode de dépôt de films d'oxydes métalliques minces transparents
US4993361A (en) * 1986-07-11 1991-02-19 Unvala Limited Chemical vapor deposition
WO2003029516A1 (fr) * 2001-09-29 2003-04-10 Cree, Inc. Appareil pour depot chimique en phase vapeur inverse
US8133322B2 (en) 2001-09-29 2012-03-13 Cree, Inc. Apparatus for inverted multi-wafer MOCVD fabrication
US7122844B2 (en) 2002-05-13 2006-10-17 Cree, Inc. Susceptor for MOCVD reactor
US8372204B2 (en) 2002-05-13 2013-02-12 Cree, Inc. Susceptor for MOCVD reactor
WO2004079043A2 (fr) * 2003-03-04 2004-09-16 Cree, Inc. Suscepteur pour reacteur mocvd inverse
WO2004079043A3 (fr) * 2003-03-04 2005-01-20 Cree Inc Suscepteur pour reacteur mocvd inverse
US8366830B2 (en) 2003-03-04 2013-02-05 Cree, Inc. Susceptor apparatus for inverted type MOCVD reactor

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