FR1456681A - Procédé de polissage - Google Patents

Procédé de polissage

Info

Publication number
FR1456681A
FR1456681A FR27666A FR27666A FR1456681A FR 1456681 A FR1456681 A FR 1456681A FR 27666 A FR27666 A FR 27666A FR 27666 A FR27666 A FR 27666A FR 1456681 A FR1456681 A FR 1456681A
Authority
FR
France
Prior art keywords
polishing process
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR27666A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US389017A external-priority patent/US3366520A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to FR27666A priority Critical patent/FR1456681A/fr
Application granted granted Critical
Publication of FR1456681A publication Critical patent/FR1456681A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F3/00—Brightening metals by chemical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
FR27666A 1964-08-12 1965-08-09 Procédé de polissage Expired FR1456681A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR27666A FR1456681A (fr) 1964-08-12 1965-08-09 Procédé de polissage

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US389017A US3366520A (en) 1964-08-12 1964-08-12 Vapor polishing of a semiconductor wafer
FR27666A FR1456681A (fr) 1964-08-12 1965-08-09 Procédé de polissage

Publications (1)

Publication Number Publication Date
FR1456681A true FR1456681A (fr) 1966-07-08

Family

ID=26165315

Family Applications (1)

Application Number Title Priority Date Filing Date
FR27666A Expired FR1456681A (fr) 1964-08-12 1965-08-09 Procédé de polissage

Country Status (1)

Country Link
FR (1) FR1456681A (fr)

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