Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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K H STEIGERWALD GmbH
Original Assignee
K H STEIGERWALD GmbH
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Application filed by K H STEIGERWALD GmbHfiledCriticalK H STEIGERWALD GmbH
Priority to FR27442ApriorityCriticalpatent/FR1443686A/fr
Application grantedgrantedCritical
Publication of FR1443686ApublicationCriticalpatent/FR1443686A/fr
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
H01J37/10—Lenses
H01J37/14—Lenses magnetic
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Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
FR27442A1964-08-051965-08-05Procédé et dispositif en vue de l'usinage de matériaux au moyen d'un faisceau de corpuscules
ExpiredFR1443686A
(fr)
Procédé et appareillage pour la focalisation automatique du faisceau de particules électrisées dans les instruments destinés au travail d'un matériau au moyen d'un faisceau de particules électrisées