FR1443476A - Electron beam device - Google Patents
Electron beam deviceInfo
- Publication number
- FR1443476A FR1443476A FR19624A FR19624A FR1443476A FR 1443476 A FR1443476 A FR 1443476A FR 19624 A FR19624 A FR 19624A FR 19624 A FR19624 A FR 19624A FR 1443476 A FR1443476 A FR 1443476A
- Authority
- FR
- France
- Prior art keywords
- electron beam
- beam device
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR19624A FR1443476A (en) | 1964-06-06 | 1965-06-04 | Electron beam device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL646406449A NL145716B (en) | 1964-06-06 | 1964-06-06 | ELECTRON BEAM DEVICE. |
FR19624A FR1443476A (en) | 1964-06-06 | 1965-06-04 | Electron beam device |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1443476A true FR1443476A (en) | 1966-06-24 |
Family
ID=26164043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR19624A Expired FR1443476A (en) | 1964-06-06 | 1965-06-04 | Electron beam device |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1443476A (en) |
-
1965
- 1965-06-04 FR FR19624A patent/FR1443476A/en not_active Expired
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