FR1441504A - Polishing process - Google Patents

Polishing process

Info

Publication number
FR1441504A
FR1441504A FR6501A FR6501A FR1441504A FR 1441504 A FR1441504 A FR 1441504A FR 6501 A FR6501 A FR 6501A FR 6501 A FR6501 A FR 6501A FR 1441504 A FR1441504 A FR 1441504A
Authority
FR
France
Prior art keywords
polishing process
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR6501A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Monsanto Co
Original Assignee
Monsanto Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Monsanto Co filed Critical Monsanto Co
Priority to FR6501A priority Critical patent/FR1441504A/en
Priority to NL6502201A priority patent/NL134092C/xx
Application granted granted Critical
Publication of FR1441504A publication Critical patent/FR1441504A/en
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • C09K3/1454Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463Aqueous liquid suspensions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30625With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/34Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
    • H01L21/46Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
    • H01L21/461Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
FR6501A 1965-01-22 1965-01-22 Polishing process Expired FR1441504A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR6501A FR1441504A (en) 1965-01-22 1965-01-22 Polishing process
NL6502201A NL134092C (en) 1965-01-22 1965-02-22

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR6501A FR1441504A (en) 1965-01-22 1965-01-22 Polishing process
NL6502201A NL134092C (en) 1965-01-22 1965-02-22

Publications (1)

Publication Number Publication Date
FR1441504A true FR1441504A (en) 1966-06-10

Family

ID=46757370

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6501A Expired FR1441504A (en) 1965-01-22 1965-01-22 Polishing process

Country Status (2)

Country Link
FR (1) FR1441504A (en)
NL (1) NL134092C (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0634465A1 (en) * 1993-07-12 1995-01-18 Koninklijke Philips Electronics N.V. Method of polishing a surface of copper or an alloy comprising mainly copper
EP0634464A1 (en) * 1993-07-12 1995-01-18 Koninklijke Philips Electronics N.V. Method of polishing a surface of a noble metal or an alloy comprising mainly noble metal

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0634465A1 (en) * 1993-07-12 1995-01-18 Koninklijke Philips Electronics N.V. Method of polishing a surface of copper or an alloy comprising mainly copper
EP0634464A1 (en) * 1993-07-12 1995-01-18 Koninklijke Philips Electronics N.V. Method of polishing a surface of a noble metal or an alloy comprising mainly noble metal
BE1007281A3 (en) * 1993-07-12 1995-05-09 Philips Electronics Nv METHOD FOR POLISHING OF A SURFACE OF COPPER OR MAINLY COPPER CONTAINING ALLOY, SOLENOID manufacturable USING THE METHOD, RÖNTGENSTRALINGCOLLIMEREND ELEMENT AND X-RADIATION REFLECTIVE ELEMENT BOTH WITH AN UNDER THE METHOD OF POLISHED SURFACE AND POLISH SUITABLE FOR APPLICATION IN THE PROCESS.
BE1007280A3 (en) * 1993-07-12 1995-05-09 Philips Electronics Nv METHOD FOR POLISHING OF A SURFACE OF A PRECIOUS METALS OR ESSENTIALLY CONTAINING ALLOY, SOLENOID manufacturable WITH METHOD OF USE AND POLISH SUITABLE FOR APPLICATION IN THE PROCESS.

Also Published As

Publication number Publication date
NL134092C (en) 1972-05-15
NL6502201A (en) 1966-08-23

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